Proceedings of the 18th International Conference On Solid State Sensors and Actuators - Transducers 2015
Book title Buchtitel
Proceedings of the 18th International Conference On Solid State Sensors and Actuators - Transducers 2015
Publisher Herausgeber
IEEE
Date issued
Results 1-3 of 3 (Search time: 0.001 seconds).
| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Mayrhofer, Patrick ; Wistrela, Elisabeth ; Kucera, Martin ; Bittner, Achim ; Schmid, Ulrich | Fabrication and Characterisation of ScAlN-based Piezoelectric MEMS Cantilevers | Konferenzbeitrag Inproceedings | 2015 | |
| 2 | Toledo, Javier ; Manzaneque, T. ; Ruiz-Díez, V. ; Kucera, Martin ; Pfusterschmied, Georg ; Wistrela, Elisabeth ; Steindl, W. ; Schmid, Ulrich ; Sànchez-Rojas, Jose Luis | Piezoelectric MEMS Resonators for Density and Viscosity Sensing in Engine Oil with Diesel Fuel | Konferenzbeitrag Inproceedings | 2015 | |
| 3 | Pfusterschmied, Georg ; Kucera, Martin ; Wistrela, Elisabeth ; Steindl, W. ; Ruiz-Díez, V. ; Bittner, Achim ; Sànchez-Rojas, Jose Luis ; Schmid, Ulrich | Piezoelectric Response Optimization of Multi Roof-Tile Modes in MEMS Resonators by Variation of the Support Boundary Conditions | Konferenzbeitrag Inproceedings | 2015 |