2021 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)

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	Authors / Editors	Title	Type	Issue Date
1	Klemenschits, Xaver ; Selberherr, Siegfried ; Filipovic, Lado	Combined Process Simulation and Emulation of an SRAM Cell of the 5nm Technology Node	Konferenzbeitrag Inproceedings	2021
2	Filipovic, Lado ; Klemenschits, Xaver	Fast Model for Deposition in Trenches using Geometric Advection	Konferenzbeitrag Inproceedings	2021
3	Ender, Johannes ; de Orio, Roberto L. ; Fiorentini, Simone ; Selberherr, Siegfried ; Goes, Wolfgang ; Sverdlov, Viktor	Reinforcement Learning Approach for Sub-Critical Current SOT-MRAM Switching	Konferenzbeitrag Inproceedings	2021
4	Fiorentini, Simone ; Ender, Johannes ; Orio, Roberto L. de ; Selberherr, Siegfried ; Goes, Wolfgang ; Sverdlov, Viktor	Spin and Charge Drift-Diffusion Approach to Torque Computation in Magnetic Tunnel Junctions	Konferenzbeitrag Inproceedings	2021
5	Rodrigues, Francio ; Aguinsky, Luiz Felipe ; Toifl, Alexander ; Scharinger, Alexander ; Hössinger, Andreas ; Weinbub, Josef	Surface Reaction and Topography Modeling of Fluorocarbon Plasma Etching	Konferenzbeitrag Inproceedings	2021