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Klemenschits, Xaver
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Results 1-15 of 15 (Search time: 0.005 seconds).

PreviewAuthors / EditorsTitleTypeIssue Date
1Aguinsky, Luiz Felipe ; Rodrigues, Francio ; Klemenschits, Xaver ; Filipovic, Lado ; Hössinger, Andreas ; Weinbub, Josef Modeling Non-Ideal Conformality during Atomic Layer Deposition in High Aspect Ratio StructuresKonferenzbeitrag Inproceedings 2022
2Bobinac, Josip ; Reiter, Tobias ; Piso, Julius ; Klemenschits, Xaver ; Baumgartner, O ; Stanojevic, Zlatan ; Strof, G ; Karner, M ; Filipovic, Lado Impact of Mask Tapering on SF6/O2 Plasma EtchingKonferenzbeitrag Inproceedings 2022
3Reiter, Tobias ; Klemenschits, Xaver ; Filipovic, Lado Impact of Plasma Induced Damage on the Fabrication of 3D NAND Flash MemoryArtikel Article 2022
4Klemenschits Xaver - 2022 - Emulation and Simulation of Microelectronic...pdf.jpgKlemenschits, Xaver Emulation and simulation of microelectronic fabrication processesThesis Hochschulschrift 2022
5Klemenschits, Xaver ; Selberherr, Siegfried ; Filipovic, Lado Geometric Advection and Its Application in the Emulation of High Aspect Ratio StructuresArtikel Article 2021
6Reiter, Tobias ; Klemenschits, Xaver ; Filipovic, Lado Impact of High-Aspect-Ratio Etching Damage on Selective Epitaxial Silicon Growth in 3D NAND Flash MemoryKonferenzbeitrag Inproceedings2021
7Klemenschits, Xaver ; Selberherr, Siegfried ; Filipovic, Lado Combined Process Simulation and Emulation of an SRAM Cell of the 5nm Technology NodeKonferenzbeitrag Inproceedings2021
8Filipovic, Lado ; Klemenschits, Xaver Fast Model for Deposition in Trenches using Geometric AdvectionKonferenzbeitrag Inproceedings2021
9Toifl, Alexander ; Quell, Michael ; Klemenschits, Xaver ; Manstetten, Paul ; Hössinger, Andreas ; Selberherr, Siegfried ; Weinbub, Josef The Level-Set Method for Multi-Material Wet Etching and Non-Planar Selective EpitaxyArtikel Article 2020
10Klemenschits, Xaver ; Selberherr, Siegfried ; Filipovic, Lado Geometric Advection Algorithm for Process EmulationKonferenzbeitrag Inproceedings2020
11Klemenschits, Xaver ; Selberherr, Siegfried ; Filipovic, Lado ; Filipovic, Lado ; Grasser, Tibor Modeling of Gate Stack Patterning for Advanced Technology Nodes: A ReviewBuchbeitrag Book Contribution 2019
12Klemenschits, Xaver ; Selberherr, Siegfried ; Filipovic, Lado Fast Volume Evaluation on Sparse Level SetsKonferenzbeitrag Inproceedings 2019
13Klemenschits, Xaver ; Manstetten, Paul ; Filipovic, Lado ; Selberherr, Siegfried Process Simulation in the Browser: Porting ViennaTS using WebAssemblyKonferenzbeitrag Inproceedings2019
14Klemenschits, Xaver ; Selberherr, Siegfried ; Filipovic, Lado Modeling of Gate Stack Patterning for Advanced Technology Nodes: A ReviewArtikel Article2018
15Klemenschits, Xaver ; Selberherr, Siegfried ; Filipovic, Lado Unified Feature Scale Model for Etching in SF6 and Cl Plasma ChemistriesKonferenzbeitrag Inproceedings 2018