Name Card

Full name Familienname, Vorname
Klemenschits, Xaver
 
Main Affiliation Organisations­zuordnung
 

Own Publications Eigene Publikationen

Results 1-20 of 23 (Search time: 0.005 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Filipovic, Lado ; Reiter, Tobias ; Klemenschits, Xaver ; Leroch, Sabine ; Stella, Robert ; Baumgartner, Oskar ; Hössinger, Andreas Process Simulation in Micro- and Nano-ElectronicsInproceedings Konferenzbeitrag 12-Jun-2023
2Bobinac, Josip ; Reiter, Tobias ; Piso, Julius ; Klemenschits, Xaver ; Baumgartner, Oskar ; Stanojevic, Zlatan ; Strof, Georg ; Karner, Markus ; Filipovic, Lado Effect of Mask Geometry Variation on Plasma Etching ProfilesArticle Artikel 16-Mar-2023
3Bobinac-2023-Micromachines-vor.pdf.jpgBobinac, Josip ; Reiter, Tobias ; Piso, Julius ; Klemenschits, Xaver ; Baumgartner, Oskar ; Stanojevic, Zlatan ; Strof, Georg ; Karner, Markus ; Filipovic, Lado Effect of Mask Geometry Variation on Plasma Etching ProfilesArticle Artikel 16-Mar-2023
4Aguinsky-2023-Solid-State Electronics-vor.pdf.jpgAguinsky, Luiz Felipe ; Souza Berti Rodrigues, Francio ; Reiter, Tobias ; Klemenschits, Xaver ; Filipovic, Lado ; Hössinger, Andreas ; Weinbub, Josef Modeling Incomplete Conformality During Atomic Layer Deposition in High Aspect Ratio StructuresArticle Artikel Mar-2023
5Filipovic, Lado ; Baumgartner, Oskar ; Klemenschits, Xaver ; Piso, Julius ; Bobinac, Josip ; Reiter, Tobias ; Strof, Georg ; Rzepa, Gerhard ; Stanojevic, Zlatan ; Karner, Markus DTCO flow for air spacer generation and its impact on power and performance at N7Article Artikel Jan-2023
6Reiter, Tobias ; Klemenschits, Xaver ; Filipovic, Lado Modeling Plasma-Induced Damage During the Dry Etching of SiliconInproceedings Konferenzbeitrag9-Oct-2022
7Reiter, Tobias ; Klemenschits, Xaver ; Filipovic, Lado Impact of Plasma Induced Damage on the Fabrication of 3D NAND Flash MemoryArtikel Article 2022
8Klemenschits Xaver - 2022 - Emulation and simulation of microelectronic...pdf.jpgKlemenschits, Xaver Emulation and simulation of microelectronic fabrication processesThesis Hochschulschrift 2022
9Aguinsky, Luiz Felipe ; Rodrigues, Francio ; Klemenschits, Xaver ; Filipovic, Lado ; Hössinger, Andreas ; Weinbub, Josef Modeling Non-Ideal Conformality during Atomic Layer Deposition in High Aspect Ratio StructuresKonferenzbeitrag Inproceedings 2022
10Bobinac, Josip ; Reiter, Tobias ; Piso, Julius ; Klemenschits, Xaver ; Baumgartner, O ; Stanojevic, Zlatan ; Strof, G ; Karner, M ; Filipovic, Lado Impact of Mask Tapering on SF6/O2 Plasma EtchingKonferenzbeitrag Inproceedings 2022
11Reiter, Tobias ; Klemenschits, Xaver ; Filipovic, Lado Impact of High-Aspect-Ratio Etching Damage on Selective Epitaxial Silicon Growth in 3D NAND Flash MemoryKonferenzbeitrag Inproceedings 2021
12Klemenschits, Xaver ; Selberherr, Siegfried ; Filipovic, Lado Geometric Advection and Its Application in the Emulation of High Aspect Ratio StructuresArtikel Article 2021
13Reiter, Tobias ; Klemenschits, Xaver ; Filipovic, Lado Impact of High-Aspect-Ratio Etching Damage on Selective Epitaxial Silicon Growth in 3D NAND Flash MemoryKonferenzbeitrag Inproceedings2021
14Filipovic, Lado ; Klemenschits, Xaver Fast Model for Deposition in Trenches using Geometric AdvectionKonferenzbeitrag Inproceedings2021
15Klemenschits, Xaver ; Selberherr, Siegfried ; Filipovic, Lado Combined Process Simulation and Emulation of an SRAM Cell of the 5nm Technology NodeKonferenzbeitrag Inproceedings2021
16Toifl, Alexander ; Quell, Michael ; Klemenschits, Xaver ; Manstetten, Paul ; Hössinger, Andreas ; Selberherr, Siegfried ; Weinbub, Josef The Level-Set Method for Multi-Material Wet Etching and Non-Planar Selective EpitaxyArtikel Article 22-Jun-2020
17Klemenschits, Xaver ; Selberherr, Siegfried ; Filipovic, Lado Geometric Advection Algorithm for Process EmulationKonferenzbeitrag Inproceedings2020
18Klemenschits, Xaver ; Selberherr, Siegfried ; Filipovic, Lado Modeling of Gate Stack Patterning for Advanced Technology Nodes: A ReviewBuchbeitrag Book Contribution 2019
19Klemenschits, Xaver ; Selberherr, Siegfried ; Filipovic, Lado Fast Volume Evaluation on Sparse Level SetsKonferenzbeitrag Inproceedings 2019
20Klemenschits, Xaver ; Manstetten, Paul ; Filipovic, Lado ; Selberherr, Siegfried Process Simulation in the Browser: Porting ViennaTS using WebAssemblyKonferenzbeitrag Inproceedings2019

Contributing Publications Mitbeteiligte Publikationen

Results 1-1 of 1 (Search time: 0.001 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Balla Cedrik - 2023 - Tetrahedral Mesh Cleaving of Level Set Surfaces.pdf.jpgBalla, Cedrik Tetrahedral mesh cleaving of level set surfacesThesis Hochschulschrift 2023