Full name Familienname, Vorname
Klemenschits, Xaver
 
Main Affiliation Organisations­zuordnung
 

Results 21-23 of 23 (Search time: 0.002 seconds).

PreviewAuthor(s)TitleTypeIssue Date
21Klemenschits, Xaver ; Selberherr, Siegfried ; Filipovic, Lado Unified Feature Scale Model for Etching in SF6 and Cl Plasma ChemistriesKonferenzbeitrag Inproceedings 2018
22Klemenschits, Xaver ; Selberherr, Siegfried ; Filipovic, Lado Unified Feature Scale Model for Etching in SF6 and Cl Plasma ChemistriesKonferenzbeitrag Inproceedings 2018
23Klemenschits, Xaver ; Selberherr, Siegfried ; Filipovic, Lado Modeling of Gate Stack Patterning for Advanced Technology Nodes: A ReviewArtikel Article 2018