| | Preview | Author(s) | Title | Type | Issue Date |
| 1 | | Filipovic, Lado ; Reiter, Tobias ; Klemenschits, Xaver ; Leroch, Sabine ; Stella, Robert ; Baumgartner, Oskar ; Hössinger, Andreas | Process Simulation in Micro- and Nano-Electronics | Inproceedings Konferenzbeitrag | 12-Jun-2023 |
| 2 | | Bobinac, Josip ; Reiter, Tobias ; Piso, Julius ; Klemenschits, Xaver ; Baumgartner, Oskar ; Stanojevic, Zlatan ; Strof, Georg ; Karner, Markus ; Filipovic, Lado | Effect of Mask Geometry Variation on Plasma Etching Profiles | Article Artikel | 16-Mar-2023 |
| 3 | | Bobinac, Josip ; Reiter, Tobias ; Piso, Julius ; Klemenschits, Xaver ; Baumgartner, Oskar ; Stanojevic, Zlatan ; Strof, Georg ; Karner, Markus ; Filipovic, Lado | Effect of Mask Geometry Variation on Plasma Etching Profiles | Article Artikel | 16-Mar-2023 |
| 4 | | Aguinsky, Luiz Felipe ; Souza Berti Rodrigues, Francio ; Reiter, Tobias ; Klemenschits, Xaver ; Filipovic, Lado ; Hössinger, Andreas ; Weinbub, Josef | Modeling Incomplete Conformality During Atomic Layer Deposition in High Aspect Ratio Structures | Article Artikel | Mar-2023 |
| 5 | | Filipovic, Lado ; Baumgartner, Oskar ; Klemenschits, Xaver ; Piso, Julius ; Bobinac, Josip ; Reiter, Tobias ; Strof, Georg ; Rzepa, Gerhard ; Stanojevic, Zlatan ; Karner, Markus | DTCO flow for air spacer generation and its impact on power and performance at N7 | Article Artikel | Jan-2023 |
| 6 | | Reiter, Tobias ; Klemenschits, Xaver ; Filipovic, Lado | Modeling Plasma-Induced Damage During the Dry Etching of Silicon | Inproceedings Konferenzbeitrag | 9-Oct-2022 |
| 7 | | Reiter, Tobias ; Klemenschits, Xaver ; Filipovic, Lado | Impact of Plasma Induced Damage on the Fabrication of 3D NAND Flash Memory | Artikel Article | 2022 |
| 8 | | Klemenschits, Xaver | Emulation and simulation of microelectronic fabrication processes | Thesis Hochschulschrift | 2022 |
| 9 | | Aguinsky, Luiz Felipe ; Rodrigues, Francio ; Klemenschits, Xaver ; Filipovic, Lado ; Hössinger, Andreas ; Weinbub, Josef | Modeling Non-Ideal Conformality during Atomic Layer Deposition in High Aspect Ratio Structures | Konferenzbeitrag Inproceedings | 2022 |
| 10 | | Bobinac, Josip ; Reiter, Tobias ; Piso, Julius ; Klemenschits, Xaver ; Baumgartner, O ; Stanojevic, Zlatan ; Strof, G ; Karner, M ; Filipovic, Lado | Impact of Mask Tapering on SF6/O2 Plasma Etching | Konferenzbeitrag Inproceedings | 2022 |
| 11 | | Reiter, Tobias ; Klemenschits, Xaver ; Filipovic, Lado | Impact of High-Aspect-Ratio Etching Damage on Selective Epitaxial Silicon Growth in 3D NAND Flash Memory | Konferenzbeitrag Inproceedings | 2021 |
| 12 | | Klemenschits, Xaver ; Selberherr, Siegfried ; Filipovic, Lado | Geometric Advection and Its Application in the Emulation of High Aspect Ratio Structures | Artikel Article | 2021 |
| 13 | | Reiter, Tobias ; Klemenschits, Xaver ; Filipovic, Lado | Impact of High-Aspect-Ratio Etching Damage on Selective Epitaxial Silicon Growth in 3D NAND Flash Memory | Konferenzbeitrag Inproceedings | 2021 |
| 14 | | Filipovic, Lado ; Klemenschits, Xaver | Fast Model for Deposition in Trenches using Geometric Advection | Konferenzbeitrag Inproceedings | 2021 |
| 15 | | Klemenschits, Xaver ; Selberherr, Siegfried ; Filipovic, Lado | Combined Process Simulation and Emulation of an SRAM Cell of the 5nm Technology Node | Konferenzbeitrag Inproceedings | 2021 |
| 16 | | Toifl, Alexander ; Quell, Michael ; Klemenschits, Xaver ; Manstetten, Paul ; Hössinger, Andreas ; Selberherr, Siegfried ; Weinbub, Josef | The Level-Set Method for Multi-Material Wet Etching and Non-Planar Selective Epitaxy | Artikel Article | 22-Jun-2020 |
| 17 | | Klemenschits, Xaver ; Selberherr, Siegfried ; Filipovic, Lado | Geometric Advection Algorithm for Process Emulation | Konferenzbeitrag Inproceedings | 2020 |
| 18 | | Klemenschits, Xaver ; Selberherr, Siegfried ; Filipovic, Lado | Modeling of Gate Stack Patterning for Advanced Technology Nodes: A Review | Buchbeitrag Book Contribution | 2019 |
| 19 | | Klemenschits, Xaver ; Selberherr, Siegfried ; Filipovic, Lado | Fast Volume Evaluation on Sparse Level Sets | Konferenzbeitrag Inproceedings | 2019 |
| 20 | | Klemenschits, Xaver ; Manstetten, Paul ; Filipovic, Lado ; Selberherr, Siegfried | Process Simulation in the Browser: Porting ViennaTS using WebAssembly | Konferenzbeitrag Inproceedings | 2019 |