Filipovic, L., Reiter, T., Klemenschits, X., Leroch, S., Stella, R., Baumgartner, O., & Hössinger, A. (2023). Process Simulation in Micro- and Nano-Electronics. In Book of abstracts of the International Workshop on Computational Nanotechnology 2023 (pp. 38–39). http://hdl.handle.net/20.500.12708/189406
Book of abstracts of the International Workshop on Computational Nanotechnology 2023
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ISBN:
978-84-09-51107-5
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Date (published):
12-Jun-2023
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Event name:
International Workshop on Computational Nanotechnology (IWCN 2023)
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Event date:
12-Jun-2023 - 16-Jun-2023
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Event place:
Barcelona, Spain
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Number of Pages:
2
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Peer reviewed:
Yes
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Keywords:
Nano-electronics; Process Simulation; TCAD
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Research facilities:
Vienna Scientific Cluster
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Project title:
Multi-Scale-Prozessmodellierung von Halbleiter-Bauelemente und -Sensoren: 00000 (Christian Doppler Forschungsgesells) Prozessabhängige Struktur-Emulation als Kooptimierungsstrategie für die Bauelementetechnologie: Not yet assigned (FFG - Österr. Forschungsförderungs- gesellschaft mbH; Global TCAD Solutions GmbH)
