<div class="csl-bib-body">
<div class="csl-entry">Filipovic, L., Reiter, T., Klemenschits, X., Leroch, S., Stella, R., Baumgartner, O., & Hössinger, A. (2023). Process Simulation in Micro- and Nano-Electronics. In <i>Book of abstracts of the International Workshop on Computational Nanotechnology 2023</i> (pp. 38–39). http://hdl.handle.net/20.500.12708/189406</div>
</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/189406
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dc.description.sponsorship
Christian Doppler Forschungsgesells
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dc.description.sponsorship
FFG - Österr. Forschungsförderungs- gesellschaft mbH; Global TCAD Solutions GmbH
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dc.language.iso
en
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dc.subject
Nano-electronics
en
dc.subject
Process Simulation
en
dc.subject
TCAD
en
dc.title
Process Simulation in Micro- and Nano-Electronics
en
dc.type
Inproceedings
en
dc.type
Konferenzbeitrag
de
dc.contributor.affiliation
TU Wien, Austria
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dc.contributor.affiliation
Silvaco (United Kingdom), United Kingdom of Great Britain and Northern Ireland (the)
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dc.relation.isbn
978-84-09-51107-5
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dc.description.startpage
38
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dc.description.endpage
39
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dc.relation.grantno
00000
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dc.relation.grantno
Not yet assigned
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dc.type.category
Abstract Book Contribution
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tuw.booktitle
Book of abstracts of the International Workshop on Computational Nanotechnology 2023
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tuw.peerreviewed
true
-
tuw.publication.invited
invited
-
tuw.project.title
Multi-Scale-Prozessmodellierung von Halbleiter-Bauelemente und -Sensoren
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tuw.project.title
Prozessabhängige Struktur-Emulation als Kooptimierungsstrategie für die Bauelementetechnologie
