Record link: 
http://hdl.handle.net/20.500.12708/30045
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Title: 
Modeling of Gate Stack Patterning for Advanced Technology Nodes: A Review
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Citation: 
Klemenschits, X., Selberherr, S., & Filipovic, L. (2019). Modeling of Gate Stack Patterning for Advanced Technology Nodes: A Review. In L. Filipovic & T. Grasser (Eds.), Miniaturized Transistors (pp. 105–135). MDPI. https://doi.org/10.3390/mi9120631
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Publisher DOI: 
10.3390/mi9120631
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Publication Type: 
Book Contribution - Edited Volume Contribution
en
Authors: 
Klemenschits, Xaver 
Selberherr, Siegfried 
Filipovic, Lado 
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Organisational Unit: 
E360 - Institut für Mikroelektronik 
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Published in: 
Miniaturized Transistors 
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ISBN: 
978-3-03921-010-7
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DOI of the book: 
10.3390/books978-3-03921-011-4
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Date (published): 
2019
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Number of Pages: 
31
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Publisher: 
MDPI, Basel
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Peer reviewed: 
Yes
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Research Areas: 
Modelling and Simulation: 50%
Computational System Design: 50%
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Science Branch: 
Elektrotechnik, Elektronik, Informationstechnik
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Appears in Collections:
Book Contribution

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