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TU Wien Academic Press
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Year of Publication
Record link:
http://hdl.handle.net/20.500.12708/30045
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Title:
Modeling of Gate Stack Patterning for Advanced Technology Nodes: A Review
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Citation:
Klemenschits, X., Selberherr, S., & Filipovic, L. (2019). Modeling of Gate Stack Patterning for Advanced Technology Nodes: A Review. In L. Filipovic & T. Grasser (Eds.),
Miniaturized Transistors
(pp. 105–135). MDPI. https://doi.org/10.3390/mi9120631
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Publisher DOI:
10.3390/mi9120631
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Publication Type:
Book Contribution - Edited Volume Contribution
en
Authors:
Klemenschits, Xaver
Selberherr, Siegfried
Filipovic, Lado
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Organisational Unit:
E360 - Institut für Mikroelektronik
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Published in:
Miniaturized Transistors
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ISBN:
978-3-03921-010-7
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DOI of the book:
10.3390/books978-3-03921-011-4
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Date (published):
2019
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Number of Pages:
31
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Publisher:
MDPI, Basel
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Peer reviewed:
Yes
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Research Areas:
Modelling and Simulation: 50%
Computational System Design: 50%
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Science Branch:
Elektrotechnik, Elektronik, Informationstechnik
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Appears in Collections:
Book Contribution
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