DC Field
Value
Language
dc.contributor.author
Klemenschits, Xaver
-
dc.contributor.author
Selberherr, Siegfried
-
dc.contributor.author
Filipovic, Lado
-
dc.contributor.editor
Filipovic, Lado
-
dc.contributor.editor
Grasser, Tibor
-
dc.date.accessioned
2022-08-01T09:22:17Z
-
dc.date.available
2022-08-01T09:22:17Z
-
dc.date.issued
2019
-
dc.identifier.citation
<div class="csl-bib-body"> <div class="csl-entry">Klemenschits, X., Selberherr, S., &#38; Filipovic, L. (2019). Modeling of Gate Stack Patterning for Advanced Technology Nodes: A Review. In L. Filipovic &#38; T. Grasser (Eds.), <i>Miniaturized Transistors</i> (pp. 105–135). MDPI. https://doi.org/10.3390/mi9120631</div> </div>
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/30045
-
dc.publisher
MDPI
-
dc.title
Modeling of Gate Stack Patterning for Advanced Technology Nodes: A Review
-
dc.type
Buchbeitrag
de
dc.type
Book Contribution
en
dc.relation.publication
Miniaturized Transistors
-
dc.relation.isbn
978-3-03921-010-7
-
dc.relation.doi
10.3390/books978-3-03921-011-4
-
dc.relation.issn
2072-666
-
dc.description.startpage
105
-
dc.description.endpage
135
-
dc.type.category
Edited Volume Contribution
-
tuw.booktitle
Miniaturized Transistors
-
tuw.peerreviewed
true
-
tuw.book.ispartofseries
Micromachines
-
tuw.relation.publisher
MDPI
-
tuw.relation.publisherplace
Basel
-
tuw.researchTopic.id
C6
-
tuw.researchTopic.id
C3
-
tuw.researchTopic.name
Modelling and Simulation
-
tuw.researchTopic.name
Computational System Design
-
tuw.researchTopic.value
50
-
tuw.researchTopic.value
50
-
tuw.publication.orgunit
E360 - Institut für Mikroelektronik
-
tuw.publisher.doi
10.3390/mi9120631
-
dc.description.numberOfPages
31
-
wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
-
wb.sciencebranch.oefos
2020
-
wb.facultyfocus
Mikro- und Nanoelektronik
de
wb.facultyfocus
Micro- and Nanoelectronics
en
wb.facultyfocus.faculty
E350
-
item.fulltext
no Fulltext
-
item.cerifentitytype
Publications
-
item.cerifentitytype
Publications
-
item.openairetype
Buchbeitrag
-
item.openairetype
Book Contribution
-
item.openairecristype
http://purl.org/coar/resource_type/c_18cf
-
item.openairecristype
http://purl.org/coar/resource_type/c_18cf
-
item.grantfulltext
restricted
-
crisitem.author.orcid
0000-0002-5583-6177
-
crisitem.author.orcid
0000-0003-1687-5058
-
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