DC Field
Value
Language
dc.contributor.author
Klemenschits, Xaver
-
dc.contributor.author
Selberherr, Siegfried
-
dc.contributor.author
Filipovic, Lado
-
dc.date.accessioned
2022-08-01T09:22:17Z
-
dc.date.available
2022-08-01T09:22:17Z
-
dc.date.issued
2019
-
dc.identifier.citation
<div class="csl-bib-body"> <div class="csl-entry">Klemenschits, X., Selberherr, S., &#38; Filipovic, L. (2019). Modeling of Gate Stack Patterning for Advanced Technology Nodes: A Review. <i>Micromachines</i>, 105–135. http://hdl.handle.net/20.500.12708/30045</div> </div>
-
dc.identifier.issn
2072-666X
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/30045
-
dc.description
Special Issue Miniaturized Transistors (DOI: 10.3390/books978-3-03921-011-4)
-
dc.language.iso
en
-
dc.publisher
MDPI
-
dc.relation.ispartof
Micromachines
-
dc.subject
technology computer-aided design (TCAD)
en
dc.subject
metal oxide semiconductor field effect transistor (MOSFET)
en
dc.subject
topography simulation
en
dc.subject
metal gate stack
en
dc.subject
level set
en
dc.subject
high-k
en
dc.subject
fin field effect transistor (FinFET)
en
dc.title
Modeling of Gate Stack Patterning for Advanced Technology Nodes: A Review
en
dc.type
Artikel
de
dc.type
Article
en
dc.description.startpage
105
-
dc.description.endpage
135
-
dc.type.category
Review Article
-
tuw.container.isbn
978-3-03921-010-7
-
tuw.journal.peerreviewed
true
-
tuw.peerreviewed
true
-
tuw.researchTopic.id
C6
-
tuw.researchTopic.id
C3
-
tuw.researchTopic.name
Modeling and Simulation
-
tuw.researchTopic.name
Computational System Design
-
tuw.researchTopic.value
50
-
tuw.researchTopic.value
50
-
dcterms.isPartOf.title
Micromachines
-
tuw.publication.orgunit
E360 - Institut für Mikroelektronik
-
dc.identifier.eissn
2072-666X
-
dc.description.numberOfPages
31
-
wb.sci
true
-
wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
-
wb.sciencebranch.oefos
2020
-
wb.facultyfocus
Mikro- und Nanoelektronik
de
wb.facultyfocus
Micro- and Nanoelectronics
en
wb.facultyfocus.faculty
E350
-
item.languageiso639-1
en
-
item.openairetype
review article
-
item.grantfulltext
restricted
-
item.fulltext
no Fulltext
-
item.cerifentitytype
Publications
-
item.openairecristype
http://purl.org/coar/resource_type/c_dcae04bc
-
crisitem.author.dept
E360 - Institut für Mikroelektronik
-
crisitem.author.dept
E360 - Institut für Mikroelektronik
-
crisitem.author.dept
E360-01 - Forschungsbereich Mikroelektronik
-
crisitem.author.orcid
0000-0002-5583-6177
-
crisitem.author.orcid
0000-0003-1687-5058
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
-
crisitem.author.parentorg
E360 - Institut für Mikroelektronik
-
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