Modeling of Gate Stack Patterning for Advanced Technology Nodes: A Review

Klemenschits, Xaver; Selberherr, Siegfried; Filipovic, Lado

doi:10.3390/mi9120631

Title:

Authors:

Klemenschits, Xaver
Selberherr, Siegfried
Filipovic, Lado

Editors:

Filipovic, Lado
Grasser, Tibor

Category:

Edited Volume Contribution

Issue Date:

2019

Citation:

Klemenschits, X., Selberherr, S., & Filipovic, L. (2019). Modeling of Gate Stack Patterning for Advanced Technology Nodes: A Review. In L. Filipovic & T. Grasser (Eds.), Miniaturized Transistors (pp. 105–135). MDPI. https://doi.org/10.3390/mi9120631

Book Title:

Miniaturized Transistors

Related Publication(s):

Miniaturized Transistors

DOI:

10.3390/mi9120631

URI:

http://hdl.handle.net/20.500.12708/30045

Organisation:

E360 - Institut für Mikroelektronik

Publication Type:

Buchbeitrag