Microelectronic Devices and Technologies: Proceedings of the 4rd International Conference on Microelectronic Devices and Technologies (MicDAT '2022)

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Microelectronic Devices and Technologies: Proceedings of the 4rd International Conference on Microelectronic Devices and Technologies (MicDAT '2022)
 

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1Bobinac, Josip ; Reiter, Tobias ; Piso, Julius ; Klemenschits, Xaver ; Baumgartner, O ; Stanojevic, Zlatan ; Strof, G ; Karner, M ; Filipovic, Lado Impact of Mask Tapering on SF6/O2 Plasma EtchingKonferenzbeitrag Inproceedings 2022