2009 10th International Conference on Ultimate Integration of Silicon

Book title Buchtitel
2009 10th International Conference on Ultimate Integration of Silicon
 
Publisher Herausgeber
IEEE Xplore
 

Publications Publikationen

Results 1-1 of 1 (Search time: 0.002 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Henkel, C. ; Abermann, S. ; Bethge, O. ; Klang, P. ; Bertagnolli, E. Impact of sputter deposited TaN and TiN metal gates on ZrO2/Ge and ZrO2/Si high-k dielectric gate stacksKonferenzbeitrag Inproceedings2009