2009 10th International Conference on Ultimate Integration of Silicon

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Publisher Verlag

IEEE Xplore

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		Preview	Author(s)	Title	Type	Issue Date
	1		Henkel, C. ; Abermann, S. ; Bethge, O. ; Klang, P. ; Bertagnolli, E.	Impact of sputter deposited TaN and TiN metal gates on ZrO2/Ge and ZrO2/Si high-k dielectric gate stacks	Konferenzbeitrag Inproceedings	2009