Book of Abstracts of the International Conferences on Scientific Computing in Electrical Engineering (SCEE)

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Book of Abstracts of the International Conferences on Scientific Computing in Electrical Engineering (SCEE)
 

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Author:  Weinbub, Josef

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1Lenz, Christoph ; Scharinger, Alexander ; Hössinger, Andreas ; Weinbub, Josef A Novel Surface Mesh Simplification Method for Flux-Dependent Topography Simulations of Semiconductor Fabrication ProcessesKonferenzbeitrag Inproceedings 2020