Record link: 
http://hdl.handle.net/20.500.12708/77054
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Title: 
A Novel Surface Mesh Simplification Method for Flux-Dependent Topography Simulations of Semiconductor Fabrication Processes
en
Citation: 
Lenz, C., Scharinger, A., Hössinger, A., & Weinbub, J. (2020). A Novel Surface Mesh Simplification Method for Flux-Dependent Topography Simulations of Semiconductor Fabrication Processes. In Book of Abstracts of the International Conferences on Scientific Computing in Electrical Engineering (SCEE) (pp. 99–100). http://hdl.handle.net/20.500.12708/77054
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Publication Type: 
Inproceedings - Abstract Book Contribution
en
Language: 
English
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Authors: 
Lenz, Christoph 
Scharinger, Alexander 
Hössinger, Andreas 
Weinbub, Josef 
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Organisational Unit: 
E360 - Institut für Mikroelektronik 
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Published in: 
Book of Abstracts of the International Conferences on Scientific Computing in Electrical Engineering (SCEE) 
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Date (published): 
2020
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Event name: 
13th International Conference on Scientific Computing in Electrical Engineering (SCEE 2020) 
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Event date: 
16-Feb-2020 - 20-Feb-2020
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Event place: 
Eindhoven, Netherlands (the)
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Number of Pages: 
2
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Peer reviewed: 
Yes
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Research Areas: 
Modelling and Simulation: 100%
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Science Branch: 
Elektrotechnik, Elektronik, Informationstechnik
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Appears in Collections:
Conference Paper

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