<div class="csl-bib-body">
<div class="csl-entry">Lenz, C., Scharinger, A., Hössinger, A., & Weinbub, J. (2020). A Novel Surface Mesh Simplification Method for Flux-Dependent Topography Simulations of Semiconductor Fabrication Processes. In <i>Book of Abstracts of the International Conferences on Scientific Computing in Electrical Engineering (SCEE)</i> (pp. 99–100). http://hdl.handle.net/20.500.12708/77054</div>
</div>
-
dc.identifier.isbn
9783030842383
-
dc.identifier.isbn
9783030842376
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/77054
-
dc.language.iso
en
-
dc.title
A Novel Surface Mesh Simplification Method for Flux-Dependent Topography Simulations of Semiconductor Fabrication Processes
en
dc.type
Konferenzbeitrag
de
dc.type
Inproceedings
en
dc.relation.publication
Book of Abstracts of the International Conferences on Scientific Computing in Electrical Engineering (SCEE)
-
dc.description.startpage
99
-
dc.description.endpage
100
-
dc.type.category
Abstract Book Contribution
-
tuw.booktitle
Book of Abstracts of the International Conferences on Scientific Computing in Electrical Engineering (SCEE)
-
tuw.peerreviewed
true
-
tuw.researchTopic.id
C6
-
tuw.researchTopic.name
Modelling and Simulation
-
tuw.researchTopic.value
100
-
tuw.publication.orgunit
E360 - Institut für Mikroelektronik
-
dc.description.numberOfPages
2
-
tuw.event.name
13th International Conference on Scientific Computing in Electrical Engineering (SCEE 2020)
-
tuw.event.startdate
16-02-2020
-
tuw.event.enddate
20-02-2020
-
tuw.event.online
On Site
-
tuw.event.type
Event for scientific audience
-
tuw.event.place
Eindhoven
-
tuw.event.country
NL
-
tuw.event.presenter
Lenz, Christoph
-
wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
-
wb.sciencebranch.oefos
2020
-
wb.facultyfocus
Mikro- und Nanoelektronik
de
wb.facultyfocus
Micro- and Nanoelectronics
en
wb.facultyfocus.faculty
E350
-
wb.presentation.type
science to science/art to art
-
item.openairetype
Konferenzbeitrag
-
item.openairetype
Inproceedings
-
item.grantfulltext
restricted
-
item.fulltext
no Fulltext
-
item.cerifentitytype
Publications
-
item.cerifentitytype
Publications
-
item.openairecristype
http://purl.org/coar/resource_type/c_18cf
-
item.openairecristype
http://purl.org/coar/resource_type/c_18cf
-
item.languageiso639-1
en
-
crisitem.author.dept
E360-01 - Forschungsbereich Mikroelektronik
-
crisitem.author.dept
E360 - Institut für Mikroelektronik
-
crisitem.author.dept
E360-01 - Forschungsbereich Mikroelektronik
-
crisitem.author.orcid
0000-0001-5969-1932
-
crisitem.author.parentorg
E360 - Institut für Mikroelektronik
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik