Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2022)

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Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2022)
 

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1Aguinsky, Luiz Felipe ; Rodrigues, Francio ; Klemenschits, Xaver ; Filipovic, Lado ; Hössinger, Andreas ; Weinbub, Josef Modeling Non-Ideal Conformality during Atomic Layer Deposition in High Aspect Ratio StructuresKonferenzbeitrag Inproceedings 2022