MME 2014 - 25th Micromechanics and Microsystems Europe workshop

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MME 2014 - 25th Micromechanics and Microsystems Europe workshop
 

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PreviewAuthor(s)TitleTypeIssue Date
1Ruiz-Díez, V. ; Hernando-Garcia, J. ; Kucera, Martin ; Ababneh, A. ; Schmid, Ulrich ; Seidel, Helmut ; Sànchez-Rojas, Jose Luis Modelling Of Out-Of-Plane And In-Plane Modes Of Microplates In Liquid MediaKonferenzbeitrag Inproceedings2014
2Stöber, Laura ; Konrath, J.P. ; Schneider, Michael ; Schmid, Ulrich Usability of Molybdenum and Molybdenum Nitride Thin Films for Microsystem ApplicationsKonferenzbeitrag Inproceedings2014