GMe Forum 2008

View Statistics Email Alert RSS Feed

Book details Buch-Details

Book title Buchtitel
GMe Forum 2008
 

Publications Publikationen

Results 1-2 of 2 (Search time: 0.002 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Abermann, Stephan ; Bethge, Ole ; Henkel, Christoph ; Bertagnolli, Emmerich New Materials and Devices for Future Generation CMOS technologiesKonferenzbeitrag Inproceedings2008
2Henkel, Christoph ; Abermann, Stephan ; Bethge, Ole ; Reiche, Manfred ; Bertagnolli, Emmerich Process integration of Pt-Metal-Gate high-k ALD dielectrics on sSOIKonferenzbeitrag Inproceedings2008