Micro- and Nano-Engineering Conference
Event name
Micro- and Nano-Engineering Conference
Event type
Event for scientific audience
Start date
19-09-2005
End date
22-09-2005
Location
Vienna, Austria
Country
Austria
Event format Veranstaltungsformat
On Site
Results 1-3 of 3 (Search time: 0.001 seconds).
| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Waid, Simon ; Mika, Johann ; Lindsey, Sloan ; Wanzenböck, Heinz D. ; Hobler, Gerhard ; Bertagnolli, Emmerich | Fabrication of 3D Axon Isolation Channels by Inverse Modelling Assisted Focused Ion Beam Patterning | Präsentation Presentation | 2012 | |
| 2 | Waid, Simon ; Mühlberger, Michael ; Wanzenböck, Heinz D. ; Bertagnolli, Emmerich | Impact of Focused Ion Beam (FIB) Stamp Repair on UV Nanoimprint Lithography (NIL) Resist Curing | Präsentation Presentation | 2012 | |
| 3 | Zoppel, Sandra ; Farsari, M. ; Merz, R. ; Zehetner, Johann ; Stangl, Günther ; Reider, Georg ; Fotakis, C. | Laser Micro Machining of 3C-SiC single crystals | Konferenzbeitrag Inproceedings | 2005 |