Pacific Rim Meeting on Electrochemical and Solid-State Science
Event name
Pacific Rim Meeting on Electrochemical and Solid-State Science
Start date
12-10-2008
End date
17-10-2008
Location
Honolulu, HI
Country
Event format Veranstaltungsformat
On Site
Results 1-3 of 3 (Search time: 0.001 seconds).
| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Bethge, Ole ; Abermann, Stephan ; Henkel, Christoph ; Bertagnolli, Emmerich | Al2O3/ZrO2/Al2O3 High-k Dielectric Stacks on Germanium Substrates Grown by Atomic Layer Deposition at High and Low Temperatures | Konferenzbeitrag Inproceedings | 2008 | |
| 2 | Abermann, Stephan ; Henkel, Christoph ; Bethge, Ole ; Bertagnolli, Emmerich | Atomic Layer Deposited Lanthanum-(Zirconate/Aluminate) Based High-K Dielectric Stacks For Future CMOS-Technology | Konferenzbeitrag Inproceedings | 2008 | |
| 3 | Henkel, Christoph ; Abermann, Stephan ; Bethge, Ole ; Reiche, Manfred ; Bertagnolli, Emmerich | Atomic Layer Deposition of High-k/Metal Gate Stack MOSFET-Devices on Strained Silicon-on-Insulator Substrates | Konferenzbeitrag Inproceedings | 2008 |