Pacific Rim Meeting on Electrochemical and Solid-State Science

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Description

Event name
Pacific Rim Meeting on Electrochemical and Solid-State Science
 
Event type
Event for scientific audience
 
Start date
12-10-2008
End date
17-10-2008
 
Location
Honolulu, HI
Country
 
Event format Veranstaltungsformat
On Site

Publications Publikationen


Treffer 1-3 von 3 (Suchzeit: 0.001 Sekunden).

VorschauAutor_in(nen)TitelDokumenttypErscheinungs­datum
1Bethge, Ole ; Abermann, Stephan ; Henkel, Christoph ; Bertagnolli, Emmerich Al2O3/ZrO2/Al2O3 High-k Dielectric Stacks on Germanium Substrates Grown by Atomic Layer Deposition at High and Low TemperaturesKonferenzbeitrag Inproceedings2008
2Abermann, Stephan ; Henkel, Christoph ; Bethge, Ole ; Bertagnolli, Emmerich Atomic Layer Deposited Lanthanum-(Zirconate/Aluminate) Based High-K Dielectric Stacks For Future CMOS-TechnologyKonferenzbeitrag Inproceedings2008
3Henkel, Christoph ; Abermann, Stephan ; Bethge, Ole ; Reiche, Manfred ; Bertagnolli, Emmerich Atomic Layer Deposition of High-k/Metal Gate Stack MOSFET-Devices on Strained Silicon-on-Insulator SubstratesKonferenzbeitrag Inproceedings2008