Micromechanics Europe MME 99

Event name
Micromechanics Europe MME 99
 
Start date
20-09-2009
End date
22-09-2009
 
Location
Toulouse, F
Country
Europe
 
Event format Veranstaltungsformat
On Site

Publications Publikationen

Results 1-1 of 1 (Search time: 0.001 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Sökmen, Ü. ; Stranz, A. ; Waag, A. ; Ababneh, A. ; Seidel, Helmut ; Schmid, Ulrich ; Peiner, E. Realization of AlN Sputter-Deposited Silicon Cantilever Resonators for Mass SensingKonferenzbeitrag Inproceedings2009