Micromechanics Europe MME 99
Event name
Micromechanics Europe MME 99
Start date
20-09-2009
End date
22-09-2009
Location
Toulouse, F
Country
Event format Veranstaltungsformat
On Site
Results 1-1 of 1 (Search time: 0.001 seconds).
| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Sökmen, Ü. ; Stranz, A. ; Waag, A. ; Ababneh, A. ; Seidel, Helmut ; Schmid, Ulrich ; Peiner, E. | Realization of AlN Sputter-Deposited Silicon Cantilever Resonators for Mass Sensing | Konferenzbeitrag Inproceedings | 2009 |