2. GMMWorkshop - Mikro-Nano-Integration
Event name
2. GMMWorkshop - Mikro-Nano-Integration
Start date
03-03-2010
End date
04-03-2010
Location
Erfurt, D
Country
Event format Veranstaltungsformat
On Site
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| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Sökmen, Ü. ; Waag, A. ; Ababneh, A. ; Seidel, Helmut ; Schmid, Ulrich ; Peiner, E. | AlN Sputter-Deposited Silicon Cantilever Resonators for Mass Sensing Fabricated Using ICP-DRIE | Konferenzbeitrag Inproceedings | 2010 |