EUROSENSORS 2014 - 28th European Conference on Solid-State Transducers

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Description

Event name
EUROSENSORS 2014 - 28th European Conference on Solid-State Transducers
 
Event type
Event for scientific audience
 
Start date
07-09-2014
End date
10-09-2014
 
Location
Brescia, I
Country
Europe
 
Event format Veranstaltungsformat
On Site

Publications Publikationen

Results 1-9 of 9 (Search time: 0.002 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Mayrhofer, P.M. ; Euchner, H. ; Bittner, A. ; Schmid, U. Circular Patterned Test Structures for Precise Determination of Piezoelectric Thin Film Constants: Application to ScxAl1-xNKonferenzbeitrag Inproceedings 2014
2Frischmuth, Tobias ; Schneider, Michael ; Grille, Thomas ; Schmid, Ulrich Effect of Reactive Gas Flow Ratio on IC-PECVD Deposited a-SiC:H Thin FilmsKonferenzbeitrag Inproceedings 2014
3Schmid, P. ; Zarfl, C. ; Balogh, G. ; Schmid, U. Gauge Factor of Titanium/Platinum Thin Films up to 350°CKonferenzbeitrag Inproceedings 2014
4Schneider, M. ; Bittner, A. ; Schmid, P. ; Schmid, U. Impact of C-axis Orientation of Aluminium Nitride Thin Films on the Long-term Stability and Mechanical Properties of Resonantly Excited MEMS CantileversKonferenzbeitrag Inproceedings 2014
5Bittner, A. ; Prewein, F. ; Schmid, U. Impact of Patterning Technique on the Long Term Stability of Ag Thin FilmsKonferenzbeitrag Inproceedings 2014
6Reitterer, J. ; Fidler, F. ; Schmid, G. ; Riel, T. ; Hambeck, C. ; Julien-Wallsee, F. Saint ; Leeb, W. ; Schmid, U. Laser Light Module with Integrated MEMS Mirror for Autostereoscopic Outdoor DisplaysKonferenzbeitrag Inproceedings 2014
7Dergez, David ; Bittner, Achim ; Schalko, Johannes ; Schmid, Ulrich Low-stress and Long-term Stable a-SiNx:H Films Deposited by ICP-PECVDKonferenzbeitrag Inproceedings 2014
8Steinhäußer, F. ; Sandulache, G. ; Fahrner, W. ; Hansal, W. ; Bittner, A. ; Schmid, U. Thermal Conductivity Measurements with Galvanic Metallization Lines on Porosified LTCC Applying the 3-Omega TechniqueKonferenzbeitrag Inproceedings 2014
9Zarfl, C. ; Schmid, P. ; Balogh, G. ; Schmid, U. TiAlN Thin Films as High Temperature Strain GaugesKonferenzbeitrag Inproceedings 2014