Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)

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Description

Event name
Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)
 
Event type
Event for scientific audience
 
Start date
26-01-2015
End date
28-01-2015
 
Location
Bologna, Italy
Country
Europe
 
Event format Veranstaltungsformat
On Site

Publications Publikationen


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Author:  Filipovic, Lado
Author:  Klemenschits, Xaver

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PreviewAuthor(s)TitleTypeIssue Date
1Klemenschits, Xaver ; Selberherr, Siegfried ; Filipovic, Lado Unified Feature Scale Model for Etching in SF6 and Cl Plasma ChemistriesKonferenzbeitrag Inproceedings 2018