Baltic ALD
Event name
Baltic ALD
Start date
28-09-2015
End date
29-09-2015
Location
Tartu, Estonia
Country
Event format Veranstaltungsformat
On Site
Results 1-1 of 1 (Search time: 0.001 seconds).
| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Bethge, Ole ; Lutzer, Bernhard ; Kaur, Jatinder ; Bertagnolli, Emmerich | Regrowth of GeO2 in between Atomic Layer Deposited high-k oxides and Ge surfaces for improving the interface trap density | Konferenzbeitrag Inproceedings | 2015 |