International Workshop Atomic Layer Deposition Russia
Event name
International Workshop Atomic Layer Deposition Russia
Start date
21-09-2015
End date
23-09-2015
Location
Moscow, Russia
Country
Event format Veranstaltungsformat
On Site
Results 1-1 of 1 (Search time: 0.001 seconds).
| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Lutzer, Bernhard ; Bethge, Ole ; Zimmermann, Christina ; Bertagnolli, Emmerich | Schottky-barrier Si and Ge MOSFETs with ALD grown bilayer gate dielectrics | Konferenzbeitrag Inproceedings | 2015 |