SPIE Smart Sensors, Actuators, and MEMS
Event name
SPIE Smart Sensors, Actuators, and MEMS
Event type
Event for scientific audience
Start date
02-05-2007
End date
04-05-2007
Location
Masapalomas, Spain
Country
Event format Veranstaltungsformat
On Site
Results 1-1 of 1 (Search time: 0.001 seconds).
| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Cervenka, Johann ; Ceric, Hajdin ; Selberherr, Siegfried | Three-Dimensional Simulation of Sacrificial Etching | Präsentation Presentation | 2007 |