International Conference on Nanoimprint and Nanoprint Technology
Event name
International Conference on Nanoimprint and Nanoprint Technology
Event type
Event for scientific audience
Start date
24-10-2012
End date
26-10-2012
Location
Napa, California, USA
Country
Event format Veranstaltungsformat
On Site
Results 1-1 of 1 (Search time: 0.001 seconds).
Preview | Authors / Editors | Title | Type | Issue Date | |
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1 | Waid, Simon ; Mühlberger, Michael ; Wanzenböck, Heinz D. ; Bertagnolli, Emmerich | The Impact of Focused Ion Beam Stamp Repair on Resist Curing in UV-based Nanoimprint Lithography | Präsentation Presentation | 2012 |