ICMCTF2022

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Description

Event name
ICMCTF2022
 
Event type
Event for scientific audience
 
Start date
22-05-2022
End date
27-05-2022
 
Location
San Diego
Country
United States
 
Event format Veranstaltungsformat
On Site

Publications Publikationen

Results 1-1 of 1 (Search time: 0.002 seconds).

PreviewAuthors / EditorsTitleTypeIssue Date
1Kretschmer, Andreas ; Bohrn, Fabian ; Hutter, Herbert ; Pitthan, Eduardo ; Primetzhofer, Daniel ; Mayrhofer, Paul Heinz Analysis of (Al,Cr,Nb,Ta,Ti)-nitride and oxynitride diffusion barriers in Cu-Si interconnects by 3D-Secondary Ion Mass SpectrometryPresentation VortragMay-2022