2022 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2022)

Event name
2022 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2022)
 
Event type
Event for scientific audience
 
Start date
06-09-2022
End date
08-09-2022
 
Location
Granada
Country
Spain
 
Conference Track
Multi Track
Event format Veranstaltungsformat
On Site

Publications Publikationen

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Author:  Rodrigues, Francio

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PreviewAuthor(s)TitleTypeIssue Date
1Rodrigues, Francio ; Aguinsky, Luiz Felipe ; Hössinger, Andreas ; Weinbub, Josef 3D Feature-Scale Modeling of Highly Selective Fluorocarbon Plasma EtchingKonferenzbeitrag Inproceedings 2022
2Aguinsky, Luiz Felipe ; Rodrigues, Francio ; Klemenschits, Xaver ; Filipovic, Lado ; Hössinger, Andreas ; Weinbub, Josef Modeling Non-Ideal Conformality during Atomic Layer Deposition in High Aspect Ratio StructuresKonferenzbeitrag Inproceedings 2022