Title Titel
Applied Surface Science
 
e-ISSN
1873-5584
 
ISSN
0169-4332
 
Publisher Herausgeber
ELSEVIER
 
Publisher's Address Herausgeber Adresse
RADARWEG 29, AMSTERDAM, Netherlands, 1043 NX
 
Listed in SCI Aufgelistet im SCI
 
Peer reviewed Begutachtet
 
 

Publications Publikationen

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Subject:  General Chemistry
Date Issued:  [2010 TO 2019]
Date Issued:  2013

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PreviewAuthor(s)TitleTypeIssue Date
1Dergez, D. ; Schalko, J. ; Bittner, A. ; Schmid, U. Fundamental properties of a-SiNx:H thin films deposited by ICP-PECVD for MEMS applicationsArtikel Article2013