Applied Surface Science
Title Titel
Applied Surface Science
e-ISSN
1873-5584
ISSN
0169-4332
Publisher Herausgeber
ELSEVIER
Publisher's Address Herausgeber Adresse
RADARWEG 29, AMSTERDAM, Netherlands, 1043 NX
Listed in SCI Aufgelistet im SCI
Peer reviewed Begutachtet
Subject
- 2 Condensed Matter Physics
- 2 General Chemistry
- 2 General Physics and Astronomy
- 2 Surfaces and Interfaces
- 1 AlN Thin film Sputter deposition Conduction mechanism Temperature activation LTCC substrates
- 1 ICP-CVD Silicon nitride Deposition rate Residual stress Wet etching Infrared spectroscopy X-ray photoelectron spectroscopy
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