Journal of Microelectromechanical Systems

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Journal description

Title Titel
Journal of Microelectromechanical Systems
 
e-ISSN
1941-0158
 
ISSN
1057-7157
 
Publisher Herausgeber
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
 

Publications Publikationen

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Author:  Schneider, Michael
Author:  Moll, Philipp

Results 1-2 of 2 (Search time: 0.002 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Schneider, Michael ; Dorfmeister, Manuel ; Moll, Philipp ; Kaltenbacher, Manfred ; Schmid, Ulrich Bi-Stable Aluminum Nitride-Based Piezoelectric Micromachined Ultrasonic Transducer (PMUT)Artikel Article 2020
2Moll-2022-Journal of Microelectromechanical Systems-vor.pdf.jpgMoll, Philipp ; Pfusterschmied, Georg ; Schneider, Michael ; Dorfmeister, Manuel ; Knafl, Sebastian ; Wanzenböck, Heinz ; Schmid, Ulrich Biocompatible a-SiC:H-Based Bistable MEMS Membranes With Piezoelectric Switching Capability in FluidsArticle Artikel Jun-2022