Journal of Microelectromechanical Systems

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Journal description

Title Titel
Journal of Microelectromechanical Systems
 
e-ISSN
1941-0158
 
ISSN
1057-7157
 
Publisher Herausgeber
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
 

Publications Publikationen

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Subject:  Mechanical Engineering

Results 1-8 of 8 (Search time: 0.002 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Yoo, Han Woong ; Albert, Stephan ; Schitter, Georg Accurate Analytic Model of a Parametrically Driven Resonant MEMS Mirror with a Fourier Series Based Torque ApproximationArtikel Article 2020
2Schneider, Michael ; Dorfmeister, Manuel ; Moll, Philipp ; Kaltenbacher, Manfred ; Schmid, Ulrich Bi-Stable Aluminum Nitride-Based Piezoelectric Micromachined Ultrasonic Transducer (PMUT)Artikel Article 2020
3Schroedter, Richard ; Yoo, Han Woong ; Brunner, David ; Schitter, Georg Charge-Based Capacitive Self-Sensing With Continuous State Observation for Resonant Electrostatic MEMS MirrorsArtikel Article 2021
4Kulygin, Alexander ; Kirsch, Christian ; Schwarz, Patrick ; Schmid, Ulrich ; Seidel, Helmut Decoupled Surface Micromachined Gyroscope With Single-Point SuspensionArtikel Article2012
5Lahlalia, Ayoub ; Le Neel, Olivier ; Shankar, Ravi ; Kam, Shian Yeu ; Filipovic, Lado Electro-Thermal Simulation & Characterization of a Microheater for SMO Gas SensorsArtikel Article 2018
6Camarda, Antonio ; Sordo, Guido ; Iannacci, Jacopo ; Schneider, Michael ; Schmid, Ulrich ; Tartagni, Marco ; Romani, Aldo Fabrication and Electromechanical Modelling of a Flexural-Mode MEMS Piezoelectric Transformer in AlNArtikel Article 2017
7Yoo, Han Woong ; Albert, Stephan ; Schitter, Georg Fourier Series based Analytic Model of a Resonant MEMS Mirror for General Voltage InputsArtikel Article 2021
8Colon-Berrios, Aida R. ; McGinn, Christine K. ; Cavallari, Marco R. ; Bahamonde, Jose A. ; Yelavik, Natallia ; Mikula, Hannes ; Bintinger, Johannes ; Kymissis, Ioannis Improved Cyclohexanone Vapor Detection via Gravimetric SensingArtikel Article 2020