Journal of Microelectromechanical Systems

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e-ISSN

1941-0158

ISSN

1057-7157

Publisher Herausgeber

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC

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Author: Bittner, Achim

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		Preview	Author(s)	Title	Type	Issue Date
	1		Mayrhofer, Patrick ; Rehlendt, Christopher ; Fischeneder, Martin ; Kucera, Martin ; Wistrela, Elisabeth ; Bittner, Achim ; Schmid, Ulrich	ScAlN MEMS Cantilevers for Vibrational Energy Harvesting Purposes	Artikel Article	2017