Journal of Micromechanics and Microengineering

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Journal description

Title Titel
Journal of Micromechanics and Microengineering
 
e-ISSN
1361-6439
 
ISSN
0960-1317
 
Publisher Herausgeber
IOP PUBLISHING LTD
 

Publications Publikationen

Filter:
Author:  Bittner, A
Date Issued:  2015
Author:  Konrath, J P

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PreviewAuthor(s)TitleTypeIssue Date
1Stöber, L ; Konrath, J P ; Krivec, S ; Patocka, F ; Schwarz, S ; Bittner, A ; Schneider, M ; Schmid, U Impact of sputter deposition parameters on molybdenum nitride thin film propertiesArtikel Article2015