Journal of Micromechanics and Microengineering

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Journal description

Title Titel
Journal of Micromechanics and Microengineering
 
e-ISSN
1361-6439
 
ISSN
0960-1317
 
Publisher Herausgeber
IOP PUBLISHING LTD
 

Publications Publikationen

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Access Type:  Open Access
Subject:  MEMS

Results 1-3 of 3 (Search time: 0.006 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Dabsch Alexander - 2017 - MEMS cantilever based magnetic field gradient sensor.pdf.jpgDabsch, Alexander ; Rosenberg, Christoph ; Stifter, Michael ; Keplinger, Franz MEMS cantilever based magnetic field gradient sensorArticle Artikel May-2017
2Patocka F - 2019 - Position-dependent mass responsivity of silicon MEMS...pdf.jpgPatocka, F. ; Schneider, M. ; Dörr, N. ; Schneidhofer, C. ; Schmid, U. Position-dependent mass responsivity of silicon MEMS cantilevers excited in the fundamental, two-dimensional roof tile-shaped modeArticle Artikel 2019
3Dabsch Alexander - 2018 - Temperature dependency of silicon structures for...pdf.jpgDabsch, Alexander ; Rosenberg, Christoph ; Stifter, Michael ; Keplinger, Franz Temperature dependency of silicon structures for magnetic field gradient sensingArticle Artikel Feb-2018