Title: MEMS cantilever based magnetic field gradient sensor
Language: English
Authors: Dabsch, Alexander
Rosenberg, Christoph 
Stifter, Michael 
Keplinger, Franz 
Category: Research Article
Keywords: cantilever; gradient sensors; magnetic field; MEMS
Issue Date: 2017
Journal: Journal of Micromechanics and Microengineering
This paper describes major contributions to a MEMS magnetic field gradient sensor. An H-shaped structure supported by four arms with two circuit paths on the surface is designed for measuring two components of the magnetic flux density and one component of the gradient. The structure is produced from silicon wafers by a dry etching process. The gold leads on the surface carry the alternating current which interacts with the magnetic field component perpendicular to the direction of the current. If the excitation frequency is near to a mechanical resonance, vibrations with an amplitude within the range of 1–103 nm are expected. Both theoretical (simulations and analytic calculations) and experimental analysis have been carried out to optimize the structures for different strength of the magnetic gradient. In the same way the impact of the coupling structure on the resonance frequency and of different operating modes to simultaneously measure two components of the flux density were tested. For measuring the local gradient of the flux density the structure was operated at the first symmetrical and the first anti-symmetrical mode. Depending on the design, flux densities of approximately 2.5 µT and gradients starting from 1 µT mm−1 can be measured.
DOI: 10.1088/1361-6439/aa654f
Library ID: AC15591251
URN: urn:nbn:at:at-ubtuw:3-8608
ISSN: 1361-6439
Organisation: E366 - Institut für Sensor- und Aktuatorsysteme 
Publication Type: Article
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