Institut für Sensor- und Aktuatorsysteme

Organization Name (de) Name der Organisation (de)
E366 - Institut für Sensor- und Aktuatorsysteme
 
Code Kennzahl
E366
 
Type of Organization Organisationstyp
Institute
Parent OrgUnit Übergeordnete Organisation
 
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Results 1-20 of 2925 (Search time: 0.007 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Moll, Philipp ; Pfusterschmied, Georg ; Leitgeb, Markus ; Schmid, Ulrich Nitrogen doping of polycrystalline, LPCVD 3C-SiC thin films using alternating supply depositionArticle Artikel Oct-2025
2Schmerling, Kaspar ; Bešić, Hajrudin ; Kugi, Andreas ; Schmid, Silvan ; Deutschmann-Olek, Andreas Optimal sensing of momentum kicks with a feedback-controlled nanomechanical resonatorArticle Artikel 7-May-2025
3Pfusterschmied, Georg ; Zellner, Christopher ; Schock, Dominik ; Schmid, Ulrich Structural Investigations of Pore Nucleation after Electrochemical Porosification of 4H-SiC for MEMSInproceedings KonferenzbeitragMay-2025
4Huber, Dominik ; Schallert, Christoph Anton ; Pfusterschmied, Georg ; Schmid, Ulrich Simultaneous Analysis of Local Device Layer Thickness and Film Stress on Cantilevered MEMS StructuresInproceedings KonferenzbeitragMay-2025
5Martini, Paolo ; Kanellopulos, Kostas ; Emminger, Stefan ; Luhmann, Niklas ; Piller, Markus ; West, Robert Grayson ; Schmid, Silvan Uncooled thermal infrared detection near the fundamental limit using a silicon nitride nanomechanical resonator with a broadband absorberArticle Artikel 16-Apr-2025
6Berger, Claudio ; Schiek, Maximilian ; Schneider, Michael ; Pfusterschmied, Georg ; Schmid, Ulrich Fully dielectric acoustic Bragg mirror of a-SiOCN:H and a-SiC:H layers for bulk acoustic wave resonatorsArticle Artikel 14-Apr-2025
7Puglia, Denise ; Odessey, Rachel ; Burns, Peter S ; Luhmann, Niklas ; Schmid, Silvan ; Higginbotham, Andrew P Room Temperature, Cavity-Free Capacitive Strong Coupling to Mechanical MotionArticle Artikel 19-Feb-2025
8Kanellopulos, Kostas ; Ladinig, Friedrich ; Emminger, Stefan ; Martini, Paolo ; West, Robert Grayson ; Schmid, Silvan Comparative analysis of nanomechanical resonators: sensitivity, response time, and practical considerations in photothermal sensingArticle Artikel 18-Feb-2025
9Moll, Philipp ; Pfusterschmied, Georg ; Schmid, Barbara ; Schwarz, Sabine ; Artner, Werner ; Schmid, Ulrich Ultra-low CTE-mismatch of 3C-SiC-on-Si thin films for high temperature MEMS applicationsArticle Artikel 1-Feb-2025
10Kanellopulos Kostas - 2025 - Nanomechanical Photothermal Sensing.pdf.jpgKanellopulos, Kostas Nanomechanical photothermal sensingThesis Hochschulschrift 2025
11Moll Philipp - 2025 - Polycrystalline Cubic Silicon Carbide Thin Films For MEMS.pdf.jpgMoll, Philipp Polycrystalline cubic silicon carbide thin films for MEMSThesis Hochschulschrift 2025
12Disnan Davide - 2025 - Ferroelectric and energy storage characterization of...pdf.jpgDisnan, Davide Ferroelectric and energy storage characterization of PVDF-based thin films and nanocompositesThesis Hochschulschrift 2025
13Hiesberger Johannes - 2025 - Leveraging Optical Lever Techniques for NEMS...pdf.jpgHiesberger, Johannes Leveraging optical lever techniques for NEMS resonatorsThesis Hochschulschrift 2025
14Timarac-Popović, Jelena ; Hiesberger, Johannes ; Sesto, Eldira ; Luhmann, Niklas ; Giesriegl, Ariane ; Besic, Hajrudin ; Lafleur, Josiane P. ; Schmid, Silvan Nanoelectromechanical System Fourier Transform Infrared (NEMS-FTIR) Spectroscopy for Nanoplastic AnalysisPresentation Vortrag2025
15Berger-2024-Journal of Applied Physics-vor.pdf.jpgBerger, Claudio ; Schiek, Maximilian ; Pandit, Shardul ; Schneider, Michael ; Pfusterschmied, Georg ; Schmid, Ulrich Bulk acoustic wave—Solidly mounted resonator with a-SiOCN:H as low-Z materialArticle Artikel 8-Oct-2024
16Pandit-2024-SENSORS AND ACTUATORS A-PHYSICAL-vor.pdf.jpgPandit, Shardul ; Schneider, Michael ; Berger, Claudio ; Schmid, Ulrich Compressive stress reduction in sputter-deposited yttrium aluminum nitride (Y₀.₂Al₀.₈N) thin films for BAW resonators with high electromechanical couplingArticle Artikel 1-Oct-2024
17West, Robert Grayson ; Schmid, Silvan Nanomechanical Photothermal Detectivity, Microscopy & SpectroscopyPresentation Vortrag19-Sep-2024
18Pompei-2024-Nanoscale-vor.pdf.jpgPompei, Emanuele ; Vlamidis, Ylea ; Ferbel, Letizia ; Zannier, Valentina ; Rubini, Silvia ; Esteban, Daniel Arenas ; Bals, Sara ; Marinelli, Carmela ; Pfusterschmied, Georg ; Leitgeb, Markus ; Schmid, Ulrich ; Heun, Stefan ; Veronesi, Stefano Functionalization of three-dimensional epitaxial graphene with metal nanoparticlesArticle Artikel 14-Sep-2024
19Yang, Tingqiang ; Perazzi, Marco ; Leitgeb, Markus ; Zellner, Christopher ; Pfusterschmied, Georg ; Schmid, Ulrich K-3. DFT calculations on the surface termination of 4H-SiC {10-10} and {11-20} during photoelectrochemical pore formationPresentation VortragSep-2024
20Mortada, Mahdi ; Schmid, Ulrich ; Schneider, Michael K-4. Analysis of the Parametric Snap-through Behaviour of Bistable PiezoMEMS in Air and VacuumPresentation VortragSep-2024