Institut für Sensor- und Aktuatorsysteme

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E366 - Institut für Sensor- und Aktuatorsysteme
 
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E366
 
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Institute
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PreviewAuthor(s)TitleTypeIssue Date
1Loesener, Martin E.M. ; Zinsler, Tobias Ewald ; Stampfer, Bernhard ; Wimmer, Florian ; Ioannidis , Eleftherios ; Pflanzl, Walter ; Minixhofer, Rainer ; Grasser, Tibor ; Waltl, Michael Evaluation of the robustness of the defect-centric model for defect parameter extraction from RTN and BTI analysis using ComphyArticle Artikel 1-Mar-2026
2Huber-2026-SENSORS AND ACTUATORS A-PHYSICAL-vor.pdf.jpgHuber, Dominik ; Gesing, Andre ; Pfusterschmied, Georg ; Platz, Daniel ; Schmid, Ulrich Design-dependent Q-factor spectroscopy: Impact of surface oxidation on dissipation in 2 micrometer thick MEMS resonatorsArticle Artikel 1-Mar-2026
3Malec, Anna ; Haiden, Christoph ; Kokkinis, Georgios ; Giouroudi, Ioanna Microfluidic platform combined with a dark field imaging system for quantification of E. coli contamination in waterArticle Artikel Feb-2026
4Huber-2026-Journal of Applied Physics-vor.pdf.jpgHuber, D. ; Stöger-Pollach, M. ; Gülly, M. ; Schallert, C. ; Steinmüller-Nethl, D. ; Pfusterschmied, G. ; Schmid, U. Quality factor enhancement in polycrystalline diamond MEMS resonators by post-deposition plasma treatmentArticle Artikel 28-Jan-2026
5Huber-2026-Journal of Sensors and Sensor Systems-vor.pdf.jpgHuber, Dominik ; Schallert, Christoph ; Loch Gesing, André ; Steinmüller-Nethl, Doris ; Pfusterschmied, Georg ; Schmid, Ulrich Automated contactless characterization of local thin film thickness and film stress with standard MEMS structures at wafer levelArticle Artikel 8-Jan-2026
6Huber Dominik - 2026 - Intrinsic Losses in Silicon Polycrystalline Diamond and...pdf.jpgHuber, Dominik Intrinsic losses in silicon, polycrystalline diamond, and silicon carbide MEMS resonatorsThesis Hochschulschrift 2026
7Zatloukal Elias Alexander - 2026 - RF Sputter Deposition of Piezoelectric AlN...pdf.jpgZatloukal, Elias Alexander RF sputter deposition of piezoelectric AlN thin filmsThesis Hochschulschrift 2026
8Gruber Jakob - 2026 - Dual Ion Beam Sputtering for low-noise piezoelectric AlN...pdf.jpgGruber, Jakob Dual Ion Beam Sputtering for low-noise piezoelectric AlN thin filmsThesis Hochschulschrift 2026
9Kwon MinHee - 2026 - Surface Acoustic Wave Resonators for Parametric Mode...pdf.jpgKwon, MinHee Surface acoustic wave resonators for parametric mode coupling in MEMSThesis Hochschulschrift 2026
10Disnan-2025-Nanocomposites-vor.pdf.jpgDisnan, Davide ; Schneider, Michael ; Zhang, Xinxin ; Qian, Kunpeng ; Bacher, Fabian ; Zhao, Yin ; Feng, Xin ; Schmid, Ulrich P(VDF-TrFE) nanocomposite thin films with cellulose nanofibers and dopamine-modified BaTiO₃ nanoparticles for enhanced energy storageArticle Artikel 31-Dec-2025
11Platz, Daniel ; Fabian, Johannes ; Schmid, Ulrich The interplay of pre-stress and higher-order basis functions in Galerkin-based postbuckling analysis of a von Karman plateArticle Artikel Dec-2025
12Dubek, Krisztián ; Schneidhofer, Christoph ; Dörr, Nicole ; Rojacz, Harald ; Plank, Bernhard ; Schmid, Ulrich Accelerated lifetime estimation and failure analysis of micromachined humidity sensors under high temperature and high humidity conditionsArticle Artikel Nov-2025
13Schneider, Michael ; Mortada, Mahdi ; Mayrhofer, Dominik ; Kaltenbacher, Manfred ; Schmid, Ulrich Local pressure field distribution of bistable PMUTs for distance sensingArticle Artikel 21-Oct-2025
14Ignat, Ioan ; Arvidsson, Elisabet ; Roos, August ; Scarano, Ermes ; Gruber, Jakob ; Platz, Daniel ; Schmid, Ulrich Multimodal electromechanics with niobium vacuum gap capacitor membranesArticle Artikel 16-Oct-2025
15Moll, Philipp ; Pfusterschmied, Georg ; Leitgeb, Markus ; Schmid, Ulrich Nitrogen doping of polycrystalline, LPCVD 3C-SiC thin films using alternating supply depositionArticle Artikel Oct-2025
16Timarac-Popović, Jelena ; Hiesberger, Johannes ; Šesto, Eldira ; Luhmann, Niklas ; Giesriegl, Ariane ; Besic, Hajrudin ; Lafleur, Josiane P. ; Schmid, Silvan Identification and Quantification of Nanoplastics Using Fourier Transform Infrared Spectroscopy Coupled with Nanoelectromechanical SystemsPresentation VortragOct-2025
17Raad, Ryan ; Sauer, Markus ; Pfusterschmied, Georg ; Schmid, Ulrich XPS Investigation of Argon Monoatomic and Gas Cluster Ion Beam Etching of 4H SiCPresentation Vortrag24-Sep-2025
18Ignat, Ioan ; Platz, Daniel ; Schmid, Ulrich High Aspect Ratio, Superconducting Vacuum Gap Capacitor NEMS with Plate Distances Down to 32 nmArticle Artikel 18-Sep-2025
19Yang, Tingqiang ; Perazzi, Marco ; Zellner, Christopher ; Pfusterschmied, Georg ; Schmid, Ulrich DFT Calculations on the Termination of 4H-SiC Non-Polar Surfaces during Photoelectrochemical Pore FormationInproceedings Konferenzbeitrag Sep-2025
20Mortada, Mahdi ; Schlögl, Matthias ; Schmid, Ulrich ; Schneider, Michael Snap-through Mode Shape Reconstruction of Bistable PiezoMEMS Membranes through Parametric ExplorationInproceedings Konferenzbeitrag Sep-2025
21Huber, Dominik ; Gülly, Michael ; Pfusterschmied, Georg ; Schmid, Ulrich Capacitive Excitation of Out-of-Plane Modes in MEMS Resonators with a Planar Electrode DesignInproceedings Konferenzbeitrag Sep-2025
22Gesing, André L. ; Platz, Daniel ; Schmid, Ulrich On the 3D Stokes flow around non-slender MEMS resonatorsArticle Artikel 30-Aug-2025
23Mortada, Mahdi ; Das, Proloy Taran ; Schmid, Ulrich ; Schneider, Michael High-resolution parametric characterization of snap-through behaviour in bistable PiezoMEMS membranesArticle Artikel 1-Aug-2025
24Timarac Popovic, Jelena ; Hiesberger, Johannes ; Sesto, Eldira ; Giesriegl, Ariane ; Luhmann, Niklas ; Lafleur, Josiane P ; Schmid, Silvan Detection of Nanoplastics Using Nanoelectromechanical System Fourier Transform Infrared Spectroscopy (NEMS-FTIR)Presentation Vortrag4-Jun-2025
25Tropper, Thomas Mathias ; Giesriegl, Ariane ; Cavalleri, Nicola ; West, Robert Grayson ; Kanellopulos, Kostas ; Hiesberger, Johannes ; Schmid, Silvan Nanomechanical Photothermal Scanning Microscopy and SpectroscopyPresentation Vortrag3-Jun-2025
26Moll, Philipp ; Muringakodan, Shareena ; Schmid, Ulrich ; Schneider, Michael Thermal Stress Tuning of Bistable Piezoelectric MEMS Membranes to Maximize Dynamic Deflections Towards Highest Switching ProbabilityInproceedings KonferenzbeitragJun-2025
27Huber-2025-Journal of Sensors and Sensor Systems-vor.pdf.jpgHuber, Dominik ; Schneider, Michael ; Fulmek, Paul ; Pfusterschmied, Georg ; Schmid, Ulrich Tailored measurement setup for the contactless characterization of MEMS resonators at the wafer levelArticle Artikel 27-May-2025
28Malec, Anna ; Christoph Haiden ; Kokkinis, Georgios ; Giouroudi, Ioanna Microfluidic Platform combined with a Dark Field Imaging System for Quantification of E. coli Contamination in WaterPresentation Vortrag21-May-2025
29Schmerling, Kaspar ; Bešić, Hajrudin ; Kugi, Andreas ; Schmid, Silvan ; Deutschmann-Olek, Andreas Optimal sensing of momentum kicks with a feedback-controlled nanomechanical resonatorArticle Artikel 7-May-2025
30Pfusterschmied, Georg ; Zellner, Christopher ; Schock, Dominik ; Schmid, Ulrich Structural Investigations of Pore Nucleation after Electrochemical Porosification of 4H-SiC for MEMSInproceedings KonferenzbeitragMay-2025
31Huber, Dominik ; Schallert, Christoph Anton ; Pfusterschmied, Georg ; Schmid, Ulrich Simultaneous Analysis of Local Device Layer Thickness and Film Stress on Cantilevered MEMS StructuresInproceedings KonferenzbeitragMay-2025
32Engr. Muzammil Gilani ; Zarepakzad, Sina ; Basit Ali ; Mehrdad Karimzadehkhouei ; Alaca, B. Erdem MEMS Platforms for Automated and High-Throughput Micromechanical Testing of Silicon NanowiresInproceedings KonferenzbeitragMay-2025
33Zarepakzad, Sina ; Thorat, Saurabh ; Egger, Patrick ; Schmid, Ulrich ; Schneider, Michael Machine Learning-Driven High-Throughput Analysis of Damping Effects in Silicon-Based Cantilever Resonators with Metallic CoatingInproceedings KonferenzbeitragMay-2025
34Zarepakzad, Sina ; Egger, Patrick ; Rahnemaihaghighi, Negin ; Muringakodan, Shareena ; Mortada, Mahdi ; Das, Proloy Taran ; Schwab, Keith ; Schmid, Ulrich ; Schneider, Michael Noise in Piezoelectric MEMS: Modeling and Experimental CharacterizationInproceedings KonferenzbeitragMay-2025
35Muringakodan, Shareena ; Schmid, Ulrich ; Schneider, Michael DC Voltage Induced Parametric Potential Energy Modulation in Bistable Piezoelectric MEMS MembranesInproceedings KonferenzbeitragMay-2025
36Loch Gesing, Andre ; Gietl, Erwin ; Stixenberger, M. ; Platz, Daniel ; Schmid, Ulrich Avoided mode-crossing in MEMS resonators under different dissipation mechanismsInproceedings KonferenzbeitragMay-2025
37Martini, Paolo ; Kanellopulos, Kostas ; Emminger, Stefan ; Luhmann, Niklas ; Piller, Markus ; West, Robert Grayson ; Schmid, Silvan Uncooled thermal infrared detection near the fundamental limit using a silicon nitride nanomechanical resonator with a broadband absorberArticle Artikel 16-Apr-2025
38Berger, Claudio ; Schiek, Maximilian ; Schneider, Michael ; Pfusterschmied, Georg ; Schmid, Ulrich Fully dielectric acoustic Bragg mirror of a-SiOCN:H and a-SiC:H layers for bulk acoustic wave resonatorsArticle Artikel 14-Apr-2025
39Kwon-2025-Journal of Micromechanics and Microengineering-vor.pdf.jpgKwon, MinHee ; Schlögl, Matthias ; Platz, Daniel ; Schmid, Ulrich GHz SAW strain sensors under high mechanical load conditionsArticle Artikel Mar-2025
40Puglia, Denise ; Odessey, Rachel ; Burns, Peter S ; Luhmann, Niklas ; Schmid, Silvan ; Higginbotham, Andrew P Room Temperature, Cavity-Free Capacitive Strong Coupling to Mechanical MotionArticle Artikel 19-Feb-2025
41Kanellopulos, Kostas ; Ladinig, Friedrich ; Emminger, Stefan ; Martini, Paolo ; West, Robert Grayson ; Schmid, Silvan Comparative analysis of nanomechanical resonators: sensitivity, response time, and practical considerations in photothermal sensingArticle Artikel 18-Feb-2025
42Moll, Philipp ; Pfusterschmied, Georg ; Schmid, Barbara ; Schwarz, Sabine ; Artner, Werner ; Schmid, Ulrich Ultra-low CTE-mismatch of 3C-SiC-on-Si thin films for high temperature MEMS applicationsArticle Artikel 1-Feb-2025
43Timarac-Popović, Jelena ; Hiesberger, Johannes ; Sesto, Eldira ; Luhmann, Niklas ; Giesriegl, Ariane ; Besic, Hajrudin ; Lafleur, Josiane P. ; Schmid, Silvan Nanoelectromechanical System Fourier Transform Infrared (NEMS-FTIR) Spectroscopy for Nanoplastic AnalysisPresentation Vortrag2025
44Cavalleri, Nicola ; West, Robert Grayson ; Giesriegl, Ariane ; Tropper, Thomas Mathias ; Schmid, Silvan Intrinsic Q-factor Enhancement with Chemical and Physical Treatments in Silicon Nitride ResonatorsPresentation Vortrag2025
45Moll Philipp - 2025 - Polycrystalline cubic silicon carbide thin films for MEMS.pdf.jpgMoll, Philipp Polycrystalline cubic silicon carbide thin films for MEMSThesis Hochschulschrift 2025
46Hiesberger Johannes - 2025 - Leveraging optical lever techniques for NEMS...pdf.jpgHiesberger, Johannes Leveraging optical lever techniques for NEMS resonatorsThesis Hochschulschrift 2025
47Kanellopulos Kostas - 2025 - Nanomechanical photothermal sensing.pdf.jpgKanellopulos, Kostas Nanomechanical photothermal sensingThesis Hochschulschrift 2025
48Disnan Davide - 2025 - Ferroelectric and energy storage characterization of...pdf.jpgDisnan, Davide Ferroelectric and energy storage characterization of PVDF-based thin films and nanocompositesThesis Hochschulschrift 2025
49Sesto Eldira - 2025 - Application of NEMS-FTIR for micro- and nanoplastic...pdf.jpgSesto, Eldira Application of NEMS-FTIR for micro- and nanoplastic detection in water : a study on artificially weathered polymer samplesThesis Hochschulschrift 2025
50Koessl Bernhard - 2025 - Parallel dynamic characterization of blood using...pdf.jpgKößl, Bernhard Parallel dynamic characterization of blood using piezoelectric MEMS resonators in temperature-controlled measurement systemThesis Hochschulschrift 2025
51Meissl Thomas - 2025 - Experimenteller Nachweis von Mode-Veering in gedehnten...pdf.jpgMeißl, Thomas Experimenteller Nachweis von Mode-Veering in gedehnten resonant-betriebenen MEMS BrückenstrukturenThesis Hochschulschrift 2025
52Piller Markus - 2025 - NEMS based thermal detector for infrared measurements at...pdf.jpgPiller, Markus NEMS based thermal detector for infrared measurements at room temperatureThesis Hochschulschrift 2025
53Gaschl Robert - 2025 - Hall-effect and noise measurements of SOT multilayer...pdf.jpgGaschl, Robert Hall-effect and noise measurements of SOT (multilayer) systemsThesis Hochschulschrift 2025
54Bacher Fabian - 2025 - Resonant MEMS sensor for detecting picogram latex beads...pdf.jpgBacher, Fabian Resonant MEMS sensor for detecting picogram latex beads in watery solutionThesis Hochschulschrift 2025
55Klein William - 2025 - Optical lever measurement system with femtometer...pdf.jpgKlein, William Optical lever Messsystem mit Femtometer AuflösungThesis Hochschulschrift 2025
56Huber, Dominik ; Jurekovic, Patricia ; Schallert, Christoph Anton ; Pfusterschmied, Georg ; Schmid, Ulrich Impact of Nitrogen Doping on the Q-Factor of Polycrystalline 3C-SiC MEMS ResonatorsInproceedings Konferenzbeitrag2025
57Moll, Philipp ; Muringakodan, Shareena ; Schmid, Ulrich ; Schneider, Michael Temperature-Dependence of Static and Dynamic Deflection of Bistable Piezoelectric Mems MembranesInproceedings Konferenzbeitrag 2025
58Schneider, Michael ; Schmid, Ulrich Pure and doped aluminum nitride - from material noise to bistable devicesInproceedings Konferenzbeitrag2025
59Berger-2024-Journal of Applied Physics-vor.pdf.jpgBerger, Claudio ; Schiek, Maximilian ; Pandit, Shardul ; Schneider, Michael ; Pfusterschmied, Georg ; Schmid, Ulrich Bulk acoustic wave—Solidly mounted resonator with a-SiOCN:H as low-Z materialArticle Artikel 8-Oct-2024
60Pandit-2024-SENSORS AND ACTUATORS A-PHYSICAL-vor.pdf.jpgPandit, Shardul ; Schneider, Michael ; Berger, Claudio ; Schmid, Ulrich Compressive stress reduction in sputter-deposited yttrium aluminum nitride (Y₀.₂Al₀.₈N) thin films for BAW resonators with high electromechanical couplingArticle Artikel 1-Oct-2024
61West, Robert Grayson ; Schmid, Silvan Nanomechanical Photothermal Detectivity, Microscopy & SpectroscopyPresentation Vortrag19-Sep-2024
62Pompei-2024-Nanoscale-vor.pdf.jpgPompei, Emanuele ; Vlamidis, Ylea ; Ferbel, Letizia ; Zannier, Valentina ; Rubini, Silvia ; Esteban, Daniel Arenas ; Bals, Sara ; Marinelli, Carmela ; Pfusterschmied, Georg ; Leitgeb, Markus ; Schmid, Ulrich ; Heun, Stefan ; Veronesi, Stefano Functionalization of three-dimensional epitaxial graphene with metal nanoparticlesArticle Artikel 14-Sep-2024
63Yang, Tingqiang ; Perazzi, Marco ; Leitgeb, Markus ; Zellner, Christopher ; Pfusterschmied, Georg ; Schmid, Ulrich K-3. DFT calculations on the surface termination of 4H-SiC {10-10} and {11-20} during photoelectrochemical pore formationPresentation VortragSep-2024
64Mortada, Mahdi ; Schmid, Ulrich ; Schneider, Michael K-4. Analysis of the Parametric Snap-through Behaviour of Bistable PiezoMEMS in Air and VacuumPresentation VortragSep-2024
65Muringakodan, Shareena ; Schmid, Ulrich ; Schneider, Michael STRESS OPTIMIZATION IN MAGNETRON SPUTTERED ALN THIN FILMS FOR FABRICATING BISTABLE PIEZOMEMS MEMBRANESPresentation VortragSep-2024
66Rahnemaihaghighi, Negin ; Schmid, Ulrich ; Schneider, Michael LOW-TEMPERATURE NOISE BEHAVIOR OF PIEZOELECTRIC ALN THIN FILMSPresentation VortragSep-2024
67Keerthi, Keerthi ; Schmid, Ulrich ; Schneider, Michael IMPACT OF SUBSTRATE TILT ON RESIDUAL STRESS AND ON PIEZOELECTRIC PROPERTIES OF DUAL ION BEAM SPUTTERED ALN THIN FILMPresentation VortragSep-2024
68Kanellopulos, Kostas ; West, Robert G ; Emminger, Stefan ; Martini, Paolo ; Sauer, Markus ; Foelske, Annette ; Schmid, Silvan Stress-Dependent Optical Extinction in Low-Pressure Chemical Vapor Deposition Silicon Nitride Measured by Nanomechanical Photothermal SensingArticle Artikel 30-Aug-2024
69Besic, Hajrudin ; Deutschmann-Olek, Andreas ; Mešić, Kenan ; Kanellopulos, Kostas ; Schmid, Silvan Optimized Signal Estimation in Nanomechanical Photothermal Sensing via Thermal Response Modelling and Kalman FilteringArticle Artikel 29-Aug-2024
70Wahid-2024-Materials Science Forum-vor.pdf.jpgWahid, Shan Nizam ; Leitgeb, Markus ; Pfusterschmied, Georg ; Schmid, Ulrich A Novel Approach for Thin 4H-SiC Foil Realization Using Controlled Spalling from a 4H-SiC WaferArticle Artikel 21-Aug-2024
71Muzammil, Muhammad ; Zarepakzad, Sina ; Ali, Basit ; Kerimzade, Umut ; Alaca, B. Erdem ; Alaka, B. Erdem Design Optimization of MEMS Stage for Pure Bending of Si NanowiresInproceedings Konferenzbeitrag Aug-2024
72Bostan Shirin, Mehdi ; Ali, Basit ; Nacarküçük, Ege ; Zarepakzad, Sina ; Kerimzade, Umut ; Alaca, B. Erdem Design and Fabrication of Low-g Piezoresistive Accelerometer Utilizing Silicon NanowireInproceedings Konferenzbeitrag Aug-2024
73Muzammil, Muhammad ; Zarepakzad, Sina ; Ali, Basit ; Bostan Shirin, Mehdi ; Kerimzade, Umut ; Alaca, B. Erdem Investigating Stress-Induced Change in Resonant Frequency of Silicon NanowiresInproceedings Konferenzbeitrag Aug-2024
74Ali, Basit ; Muzammil, Muhammad ; Bostan Shirin, Mehdi ; Zarepakzad, Sina ; Kerimzade, Umut ; Alaca, B. Erdem Technology Development for Monolithic Integration of Suspended Sub-micron Si Nanowires with Thick Microelectromechanical SystemsInproceedings Konferenzbeitrag Aug-2024
75Gesing, André L. ; Huber, Dominik ; Steinmüller-Neth, Doris ; Pfusterschmied, Georg ; Platz, Daniel ; Schmid, Ulrich Modeling polycrystalline diamond MEMS resonatorsInproceedings Konferenzbeitrag25-Jun-2024
76Platz, Daniel ; Loch Gesing, Andre ; Schmid, Ulrich Modelling the Interaction of Non-Slender MEMS Resonators with Fluidic and Elastic EnvironmentsInproceedings Konferenzbeitrag24-Jun-2024
77Schneider, Michael ; Schmid, Ulrich How bandwidth and sample points affect precision of Q-factor measurements in PiezoMEMS resonatorsInproceedings Konferenzbeitrag24-Jun-2024
78Zarepakzad, Sina ; Esfahani, Mohammad Nasr ; Tasdemir, Dr. Zuhal ; Schneider, Michael ; Schmid, Ulrich ; Leblebici, Yusuf ; Alaca, B. Erdem Transverse Vibration of Silicon Nanowires: Surface PropertiesInproceedings Konferenzbeitrag24-Jun-2024
79Schneider, Michael ; Schmid, Ulrich Material Aspects and Unconventional Device Concepts for PiezoMEMSPresentation Vortrag7-Jun-2024
80Huber, Dominik ; Platz, Daniel ; Loch Gesing, Andre ; Fulmek, Paul ; Steinmüller-Nethl, Doris ; Pfusterschmied, Georg ; Schmid, Ulrich Grain Size Dependent Q-Factor in Polycrystalline Diamond MEMS ResonatorsPresentation VortragJun-2024
81Wahid, Shan ; Leitgeb, Markus ; Pfusterschmied, Georg ; Schmid, Ulrich A Novel Method of Creating Thin 4H-SiC Foils from 4H-SiC Substrates by Controlled SpallingPresentation VortragJun-2024
82Platz, Daniel ; Stixenberger, M. ; Loch Gesing, Andre ; Ignat, Ioan ; Kähler, Hendrik ; Schmid, Ulrich Anchor Losses in MEMS Plate Resonators of Finite WidthPresentation VortragJun-2024
83Ermilova, Ekaterina ; Klapetek, Petr ; Pfusterschmied, Georg ; Nanjappan, Chezhiyan ; Schmid, Ulrich ; Hertwig, Andreas On the Use of Spectroscopic Imaging Ellipsometry for Quantification and Characterisation of Defects in Thin Films for Power ElectronicsPresentation Vortrag29-May-2024
84Moll-2024-Journal of Microelectromechanical Systems-am.pdf.jpgMoll, Philipp ; Schwarz, Sabine ; Pfusterschmied, Georg ; Artner, Werner ; Schmid, Ulrich Polycrystalline Lpcvd 3c-Sic Thin Films on Sio2 Using Alternating Supply DepositionArticle Artikel 24-May-2024
85Berger-2024-Journal of Applied Physics-vor.pdf.jpgBerger, Claudio ; Schneider, Michael ; Pfusterschmied, Georg ; Schmid, U Plasma-enhanced chemical vapor deposition a-SiOCN:H low-Z thin films for bulk acoustic wave resonatorsArticle Artikel 24-Apr-2024
86Moll-2024-SENSORS AND ACTUATORS A-PHYSICAL-vor.pdf.jpgMoll, Philipp ; Pfusterschmied, Georg ; Schwarz, Sabine ; Stöger-Pollach, Michael ; Schmid, Ulrich Impact of alternating precursor supply and gas flow on the LPCVD growth behavior of polycrystalline 3C-SiC thin films on SiArticle Artikel 18-Apr-2024
87Schloegl-2024-Smart Materials and Structures-vor.pdf.jpgSchlögl, Matthias ; Schneider, Michael ; Schmid, Ulrich Scalable electromagnetic energy harvester for wind turbine rotor blade applicationsArticle Artikel 18-Apr-2024
88Alasatri-2024-Proceedings-vor.pdf.jpgAlasatri, Suresh ; Schneider, Michael ; Mirwald, Johannes ; Hofko, Bernhard ; Schmid, Ulrich Real-Time Tracking of the Dynamic Viscosity of Bitumen with Piezoelectric MEMS ResonatorsArticle Artikel 12-Apr-2024
89Disnan-2024-Polymer-vor.pdf.jpgDisnan, Davide ; Bacher, Fabian ; Berger, Stephan Christian ; Schneider, Michael ; Schmid, Ulrich Microstructural influence on thermal stability of ferroelectric properties in P(VDF-TrFE) spin cast thin filmsArticle Artikel 9-Apr-2024
90Besic, Hajrudin ; Demir, Alper ; Vukicevic, Veljko ; Steurer, Johannes ; Schmid, Silvan Adaptable Frequency Counter With Phase Filtering for Resonance Frequency Monitoring in Nanomechanical SensingArticle Artikel 15-Mar-2024
91Castañeda, Armando ; Ditmarsch, Hans van ; Kuznets, Roman ; Moses, Yoram ; Schmid, Ulrich Epistemic and Topological Reasoning in Distributed SystemsArticle Artikel8-Mar-2024
92Huber, Dominik ; Platz, Daniel ; Gesing, André L. ; Fulmek, Paul ; Steinmüller-Nethl, Doris ; Pfusterschmied, Georg ; Schmid, Ulrich Impact of Grain Size on The Q-Factor of Poly-Crystalline Diamond Mems ResonatorsInproceedings Konferenzbeitrag 22-Feb-2024
93Xiang-2024-Langmuir-vor.pdf.jpgXiang, Yijie ; Fulmek, Paul ; Sauer, Markus ; Foelske, Annette ; Schmid, Ulrich Characterization of Surface Modifications in Oxygen Plasma-Treated Teflon AF1600Article Artikel 21-Feb-2024
94Dubek-2024-Journal of Sensors and Sensor Systems-vor.pdf.jpgDubek, Krisztián ; Schneidhofer, Christoph ; Dörr, Nicole ; Schmid, Ulrich Laboratory robustness validation of a humidity sensor system for the condition monitoring of grease-lubricated components for railway applicationsArticle Artikel 14-Feb-2024
95Moll, Philipp ; Pfusterschmied, Georg ; Schmid, Ulrich Impact of Excess Carbon at the 3C-SiC/SiO₂ Interface Using LPCVD-Based Alternating Supply DepositionInproceedings Konferenzbeitrag Feb-2024
96Schubert, Jasmin S. ; Doloszeski, Eva ; Ayala Leiva, Pablo Rony Alberto ; Nagaraju Myakala, Stephen ; Rath, Jakob ; Fickl, Bernhard ; Giesriegl, Ariane ; Apaydin, Dogukan H. ; Bayer-Skoff, Bernhard Christian ; Kashiwaya, Shun ; Cherevan, Alexey ; Eder, Dominik Nature of the Active Ni State for Photocatalytic Hydrogen Generation (Adv. Mater. Interfaces 3/2024)Multimedia and Design Multimedia und Design25-Jan-2024
97Kähler, Hendrik ; Winkler, Robert ; Arthaber, Holger ; Plank, Harald ; Schmid, Silvan Toward practical mass spectrometry with nanomechanical pillar resonators by surface acoustic wave transductionArticle Artikel Jan-2024
98Parmar, Priyank Mehulbhai ; Leitgeb, Markus ; Yadav, Manoj Kumar ; Zellner, Christopher ; Wedl, Günter ; Pfusterschmied, Georg ; Schmid, Ulrich High-temperature adhesive bonding of 4H-SiC substratesPresentation Vortrag2024
99Perazzi-2024-Materials Science Forum-vor.pdf.jpgPerazzi, Marco ; Leitgeb, Markus ; Vengattoor Raghu, Appu ; Zellner, Christopher ; Hahn, Rainer ; Kirnbauer, Alexander ; Schwarz, Sabine ; Pfusterschmied, Georg ; Schmid, Ulrich High-Temperature Reorganization Behavior of Single-Crystalline Porous 4H-SiC Thin FoilsArticle Artikel 2024
100Schneider, Michael ; Mortada, Mahdi ; Mayrhofer, Dominik ; Kaltenbacher, Manfred ; Schmid, Ulrich Directivity and distance dependence of generated pressure field of bistable PMUTsInproceedings Konferenzbeitrag2024