Journal of Micromechanics and Microengineering

Title Titel
Journal of Micromechanics and Microengineering
 
e-ISSN
1361-6439
 
ISSN
0960-1317
 
Publisher Herausgeber
IOP PUBLISHING LTD
 

Publications Publikationen

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Author:  Bittner, A

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PreviewAuthor(s)TitleTypeIssue Date
1Wang, W B ; Fu, Y Q ; Chen, J J ; Xuan, W P ; Chen, J K ; Wang, X Z ; Mayrhofer, P ; Duan, P F ; Bittner, A ; Schmid, U ; Luo, J K AlScN thin film based surface acoustic wave devices with enhanced microfluidic performanceArtikel Article 2016
2Stöber, L ; Konrath, J P ; Krivec, S ; Patocka, F ; Schwarz, S ; Bittner, A ; Schneider, M ; Schmid, U Impact of sputter deposition parameters on molybdenum nitride thin film propertiesArtikel Article2015
3Kucera, M ; Manzaneque, T ; Sánchez-Rojas, J L ; Bittner, A ; Schmid, U Q-factor enhancement for self-actuated self-sensing piezoelectric MEMS resonators applying a lock-in driven feedback loopArtikel Article2013
4Pfusterschmied, G ; Kucera, M ; Wistrela, E ; Manzaneque, T ; Ruiz-Díez, V ; Sánchez-Rojas, J L ; Bittner, A ; Schmid, U Temperature dependent performance of piezoelectric MEMS resonators for viscosity and density determination of liquidsArtikel Article2015