JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

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Journal description

Title Titel
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
 
e-ISSN
2166-2754
 
ISSN
2166-2746
 
Publisher Herausgeber
A V S AMER INST PHYSICS
 
Publisher's Address Herausgeber Adresse
STE 1 NO 1, 2 HUNTINGTON QUADRANGLE, MELVILLE, USA, NY, 11747-4502
 
Listed in SCI Aufgelistet im SCI
 
Peer reviewed Begutachtet
 
 

Publications Publikationen

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Author:  Wanzenböck, Heinz D.
Author:  Bergmair, Iris

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PreviewAuthor(s)TitleTypeIssue Date
1Wanzenböck, Heinz D. ; Waid, Simon ; Bertagnolli, Emmerich ; Mühlberger, Michael ; Bergmair, Iris ; Schöftner, Rainer Nanoimprint lithography stamp modification utilizing focused ion beamsArtikel Article 2009