JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Title Titel

e-ISSN

2166-2754

ISSN

2166-2746

Publisher Herausgeber

A V S AMER INST PHYSICS

Publisher's Address Herausgeber Adresse

STE 1 NO 1, 2 HUNTINGTON QUADRANGLE, MELVILLE, USA, NY, 11747-4502

Listed in SCI Aufgelistet im SCI

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Subject: Process Chemistry and Technology

Author: Kaczer, B.

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		Preview	Author(s)	Title	Type	Issue Date
	1		Kaczer, B. ; Franco, J. ; Tyaginov, S. ; Jech, M. ; Rzepa, G. ; Grasser, T. ; O'Sullivan, B. J. ; Ritzenhaler, R. ; Schram, T. ; Spessot, A. ; Linten, D. ; Horiguchi, N.	Mapping of CMOS FET Degradation in Bias Space--Application to Dram Peripheral Devices	Artikel Article	2017
	2		Toledano-Luque, M. ; Kaczer, B. ; Roussel, Ph. ; Cho, M. J. ; Grasser, T. ; Groeseneken, G.	Temperature Dependence of the Emission and Capture Times of SiON Individual Traps after Positive Bias Temperature Stress	Artikel Article	2011