JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Title Titel

e-ISSN

2166-2754

ISSN

2166-2746

Publisher Herausgeber

A V S AMER INST PHYSICS

Publisher's Address Herausgeber Adresse

STE 1 NO 1, 2 HUNTINGTON QUADRANGLE, MELVILLE, USA, NY, 11747-4502

Listed in SCI Aufgelistet im SCI

Peer reviewed Begutachtet

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Subject: Process Chemistry and Technology

Author: Doherty, R.

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		Preview	Author(s)	Title	Type	Issue Date
	1		Giubertoni, D. ; Pepponi, Giancarlo ; Sahiner, M.A. ; Kelty, S.P. ; Gennaro, S. ; Bersani, M. ; Kah, M. ; Kirkby, K.J. ; Doherty, R. ; Foad, M.A. ; Meirer, F. ; Streli, Christina ; Woicik, J.C. ; Pianetta, P.	Deactivation of submelt laser annealed arsenic ultrashallow junctions in silicon during subsequent thermal treatment	Artikel Article	2010