JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

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Journal description

Title Titel
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
 
e-ISSN
2166-2754
 
ISSN
2166-2746
 
Publisher Herausgeber
A V S AMER INST PHYSICS
 
Publisher's Address Herausgeber Adresse
STE 1 NO 1, 2 HUNTINGTON QUADRANGLE, MELVILLE, USA, NY, 11747-4502
 
Listed in SCI Aufgelistet im SCI
 
Peer reviewed Begutachtet
 
 

Publications Publikationen

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Date Issued:  [2000 TO 2023]
Author:  Wanzenböck, Heinz D.

Results 1-9 of 9 (Search time: 0.002 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Roediger, Peter ; Wanzenboeck, Heinz D. ; Hochleitner, Gottfried ; Bertagnolli, Emmerich Crystallinity-retaining removal of germanium by direct-write focused electron beam induced etchingArtikel Article 2011
2Hochleitner, Gottfried ; Wanzenböck, Heinz D. ; Bertagnolli, Emmerich Electron beam induced deposition of iron nanostructuresArtikel Article 2008
3Rödiger, Peter ; Wanzenböck, Heinz D. ; Hochleitner, Gottfried ; Bertagnolli, Emmerich Evaluation of chamber contamination in a scanning electron microscopeArtikel Article 2009
4Waid, Simon ; Wanzenboeck, Heinz D. ; Muehlberger, Michael ; Gavagnin, Marco ; Bertagnolli, Emmerich Focused ion beam direct patterning of hardmask layersArtikel Article 2014
5Waid, Simon ; Wanzenboeck, Heinz D. ; Gavagnin, Marco ; Langegger, Ruppert ; Muehlberger, Michael ; Bertagnolli, Emmerich Focused ion beam induced Ga-contamination-An obstacle for UV-nanoimprint stamp repair?Artikel Article 2013
6Roediger, Peter ; Mijic, Mario ; Zeiner, Clemens ; Lugstein, Alois ; Wanzenboeck, Heinz D. ; Bertagnolli, Emmerich Local, direct-write, damage-free thinning of germanium nanowiresArtikel Article 2011
7Ebm, Christoph ; Hobler, Gerhard ; Waid, Simon ; Wanzenboeck, Heinz D. Modeling of precursor coverage in ion-beam induced etching and verification with experiments using XeF2 on SiO2Artikel Article 2010
8Wanzenböck, Heinz D. ; Waid, Simon ; Bertagnolli, Emmerich ; Mühlberger, Michael ; Bergmair, Iris ; Schöftner, Rainer Nanoimprint lithography stamp modification utilizing focused ion beamsArtikel Article 2009
9Ebm, Christoph ; Hobler, Gerhard ; Waid, Simon ; Wanzenboeck, Heinz D. Quantitative simulation of ion-beam induced deposition of nanostructuresArtikel Article 2011