Materials Science in Semiconductor Processing

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Journal description

Title Titel
Materials Science in Semiconductor Processing
 
e-ISSN
1873-4081
 
ISSN
1369-8001
 
Publisher Herausgeber
ELSEVIER SCI LTD
 
Publisher's Address Herausgeber Adresse
125 London Wall, London, England, EC2Y 5AS
 
Listed in SCI Aufgelistet im SCI
 
Peer reviewed Begutachtet
 
 

Publications Publikationen

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Author:  Bittner, A.
Author:  Fischeneder, M.

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PreviewAuthor(s)TitleTypeIssue Date
1Fischeneder, M. ; Wistrela, E. ; Bittner, A. ; Schneider, M. ; Schmid, U. Tailored wafer holder for a reliable deposition of sputtered aluminium nitride thin films at low temperaturesArtikel Article 2017