MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

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Journal description

Title Titel
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
 
e-ISSN
1432-1858
 
ISSN
0946-7076
 
Publisher Herausgeber
SPRINGER HEIDELBERG
 
Publisher's Address Herausgeber Adresse
TIERGARTENSTRASSE 17, HEIDELBERG, GERMANY, D-69121
 
Listed in SCI Aufgelistet im SCI
 
Peer reviewed Begutachtet
 
 

Publications Publikationen

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Subject:  Electronic, Optical and Magnetic Materials
Date Issued:  [2000 TO 2009]

Results 1-7 of 7 (Search time: 0.002 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Schmid, U. ; Ababneh, A. ; Seidel, H. ; Wagner, R. ; Bauer, K. Characterization of Aluminium Nitride and Aluminium Oxide Thin Films Sputter-Deposited On Organic SubstratesArtikel Article2008
2Cvetanovic, Aleksandra ; Cvetanovic, Andreja ; Andrijasevic, Daniela ; Giouroudi, Ioanna ; Brenner, Werner Development of a novel protective cover for micro manipulation process in the SEM chamberArtikel Article 2008
3Ababneh, A. ; Kreher, H. ; Schmid, U. Etching Behaviour of Sputter-Deposited Aluminium Nitride Thin Films in H3P04 and KOH SolutionsArtikel Article2008
4Schmid, U. ; Schmitt-Landsiedel, D. ; Krötz, G. Evaluation of Electron Beam Welding Technique for the Integration of Robust Sensor Elements into High-Pressure Automotive SystemsArtikel Article2008
5Cvetanovic, Aleksandra ; Cvetanovic, Andreja ; Soucek, Marek ; Andrijasevic, Daniela ; Brenner, Werner Micro assembly in a SEM chamber and the solution for collision preventionArtikel Article 16-Apr-2008
6Kulygin, A. ; Gergen, M. ; Schmid, U. ; Seidel, H. Optimizing the Performance of a Coriolis-based Angular Rate Sensor Applying an Analytical ApproachArtikel Article2008
7Cervenka, Johann ; Ceric, Hajdin ; Selberherr, Siegfried Three-Dimensional Simulation of Sacrificial EtchingArtikel Article2008