MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

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Journal description

Title Titel
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
 
e-ISSN
1432-1858
 
ISSN
0946-7076
 
Publisher Herausgeber
SPRINGER HEIDELBERG
 
Publisher's Address Herausgeber Adresse
TIERGARTENSTRASSE 17, HEIDELBERG, GERMANY, D-69121
 
Listed in SCI Aufgelistet im SCI
 
Peer reviewed Begutachtet
 
 

Publications Publikationen

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Author:  Seidel, H.

Results 1-9 of 9 (Search time: 0.003 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Manzaneque, Tomás ; Hernando, J. ; Rodríguez-Aragón, L. ; Ababneh, A. ; Seidel, H. ; Schmid, U. ; Sánchez-Rojas, J. L. Analysis of the quality factor of AlN-actuated micro-resonators in air and liquidArtikel Article2010
2Schmid, U. ; Ababneh, A. ; Seidel, H. ; Wagner, R. ; Bauer, K. Characterization of Aluminium Nitride and Aluminium Oxide Thin Films Sputter-Deposited On Organic SubstratesArtikel Article2008
3Ababneh, Abdallah ; Al-Omari, A. N. ; Dagamseh, A. M. K. ; Qiu, H. C. ; Feili, D. ; Ruiz-Díez, V. ; Manzaneque, T. ; Hernando, J. ; Sánchez-Rojas, J. L. ; Bittner, A. ; Schmid, U. ; Seidel, H. Electrical characterization of micromachined AlN resonators at various back pressuresArtikel Article2014
4Bittner, A. ; Pagel, N. ; Seidel, H. ; Schmid, U. Long-term stability of Ag and Cu thin films on glass, LTCC and alumina substratesArtikel Article2012
5Ruiz, V. ; Hernando-García, J. ; Ababneh, A. ; Seidel, H. ; Schmid, U. ; Sánchez-Rojas, J. L. Modelling and characterization of AlN-actuated microcantilevers vibrating in the first in-plane modeArtikel Article2012
6Kulygin, A. ; Gergen, M. ; Schmid, U. ; Seidel, H. Optimizing the Performance of a Coriolis-based Angular Rate Sensor Applying an Analytical ApproachArtikel Article2008
7Manzaneque, Tomás ; Ruiz-Díez, V. ; Hernando-García, J. ; Ababneh, A. ; Al-Omari, A. N. ; Kucera, M. ; Bittner, A. ; Schmid, U. ; Seidel, H. ; Sánchez-Rojas, J. L. Piezoelectric in‑plane microplate resonators based on contour and flexure‑actuated modesArtikel Article2014
8Oliver, M. J. ; Hernando-García, J. ; Ababneh, A. ; Seidel, H. ; Schmid, U. ; Andrés, J. P. ; Pobedinskas, P. ; Haenen, K. ; Sánchez-Rojas, J. L. Resonantly excited AlN-based microcantilevers for immunosensingArtikel Article2012
9Grosser, Michaela ; Münch, M. ; Brenner, J. ; Wilke, M. ; Seidel, H. ; Bienert, C. ; Roosen, A. ; Schmid, U. Study on microstructural, chemical and electrical properties of tantalum nitride thin films deposited by reactive direct current magnetron sputteringArtikel Article 2010