Semiconductor Science and Technology

View Statistics Email Alert RSS Feed

Journal description

Title Titel
Semiconductor Science and Technology
 
e-ISSN
1361-6641
 
ISSN
0268-1242
 
Publisher Herausgeber
IOP PUBLISHING LTD
 
Publisher's Address Herausgeber Adresse
TEMPLE CIRCUS, TEMPLE WAY, BRISTOL, ENGLAND, BS1 6BE
 
Listed in SCI Aufgelistet im SCI
 
Peer reviewed Begutachtet
 
 

Publications Publikationen

Filter:
Subject:  Materials Chemistry
Date Issued:  [2000 TO 2009]
Author:  Abermann, Stephan

Results 1-1 of 1 (Search time: 0.001 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Henkel, Christoph ; Abermann, Stephan ; Bethge, Ole ; Bertagnolli, Emmerich Atomic layer-deposited platinum in high-κ/metal gate stacksArtikel Article2009