Thin Solid Films
Title Titel
Thin Solid Films
e-ISSN
1879-2731
ISSN
0040-6090
Publisher Herausgeber
ELSEVIER SCIENCE SA
Publisher's Address Herausgeber Adresse
PO BOX 564, LAUSANNE, SWITZERLAND, 1001
Listed in SCI Aufgelistet im SCI
Peer reviewed Begutachtet
Subject
- 3 Electronic, Optical and Magnetic Materials
- 3 Materials Chemistry
- 3 Metals and Alloys
- 3 Surfaces and Interfaces
- 1 DC reactive sputtering
- 1 Leakage current
- 1 Poole-Frenkel
- 1 Residual stress
- 1 RF reactive sputtering Silicon nitride Residual stress Etching behaviour Leakage current Poole-Frenkel
- 1 Silicon nitride
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